Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D557226 | Electrode cover for a plasma processing apparatus | Takeo Uchino, Masakazu Isozaki, Tsunehiko Tsubone, Akitaka Makino | 2007-12-11 |
| 6899789 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Tsunehiko Tsubone | 2005-05-31 |
| 6676805 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Tsunehiko Tsubone | 2004-01-13 |
| 6645871 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Tsunehiko Tsubone | 2003-11-11 |
| 6610170 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Tsunehiko Tsubone | 2003-08-26 |
| 6610171 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Tsunehiko Tsubone | 2003-08-26 |
| 6544379 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Tsunehiko Tsubone | 2003-04-08 |
| 6524428 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Tsunehiko Tsubone | 2003-02-25 |
| 6336991 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Tsunehiko Tsubone | 2002-01-08 |
| 6221201 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Tsunehiko Tsubone | 2001-04-24 |
| 6217705 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshitumi Ogawa, Tsunehiko Tsubone | 2001-04-17 |
| 6048434 | Substrate holding system including an electrostatic chuck | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Tsunehiko Tsubone | 2000-04-11 |
| 5985035 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Tsunehiko Tsubone | 1999-11-16 |
| 5961774 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Tsunehiko Tsubone | 1999-10-05 |
| 5906684 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Tsunehiko Tsubone | 1999-05-25 |
| 5792304 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Tsunehiko Tsubone | 1998-08-11 |
| 5580420 | Plasma generating method and apparatus and plasma processing method and apparatus | Katsuya Watanabe, Tetsunori Kaji, Naoyuki Tamura, Kenji Nakata, Seiichi Watanabe +2 more | 1996-12-03 |
| 5458687 | Method of and apparatus for securing and cooling/heating a wafer | Naoyuki Tamura, Akitaka Makino | 1995-10-17 |