Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11710619 | Vacuum processing apparatus | Kohei Sato, Kazuumi Tanaka, Yusaku Sakka | 2023-07-25 |
| 10103007 | Plasma processing apparatus with gas feed and evacuation conduit | Takumi Tandou | 2018-10-16 |
| 8897906 | Wafer processing based on sensor detection and system learning | Tomohiro Ohashi, Hiroho Kitada, Hideki Kihara | 2014-11-25 |
| 8740011 | Vacuum processing apparatus | Susumu Tauchi | 2014-06-03 |
| 8569177 | Plasma processing apparatus and plasma processing method | Tomohiro Ohashi, Hiroho Kitada, Muneo Furuse, Tomoyuki Tamura | 2013-10-29 |
| 8460467 | Vacuum processing apparatus | Youji Takahashi, Minoru Soraoka, Hideki Kihara, Susumu Tauchi | 2013-06-11 |
| 8286822 | Vacuum processing apparatus | Susumu Tauchi | 2012-10-16 |
| 8216420 | Plasma processing apparatus | Hideyuki Kazumi, Akihiro Sano, Hitoshi Tamura, Masamichi Sakaguchi | 2012-07-10 |
| 8148268 | Plasma treatment apparatus and plasma treatment method | Kohei Sato, Hideaki Kondo, Susumu Tauchi | 2012-04-03 |
| 8100620 | Vacuum processing apparatus | Masakazu Isozaki, Shingo Kimura, Minoru Yatomi | 2012-01-24 |
| 8048259 | Vacuum processing apparatus | Michiaki Kobayashi, Tsutomu Nakamura, Takeo Uchino, Masashi NAKAGOME | 2011-11-01 |
| 7976632 | Vacuum processing apparatus | Youji Takahashi, Minoru Soraoka, Hideki Kihara, Susumu Tauchi | 2011-07-12 |
| 7833382 | Vacuum processing apparatus | Youji Takahashi, Minoru Soraoka, Hideki Kihara, Susumu Tauchi | 2010-11-16 |
| 7828928 | Vacuum processing apparatus | Youji Takahashi, Minoru Soraoka, Hideki Kihara, Susumu Tauchi | 2010-11-09 |
| 7807581 | Plasma processing apparatus and plasma processing method | Susumu Tauchi, Seiichi Watanabe, Naoki Yasui | 2010-10-05 |
| 7674351 | Plasma processing apparatus | Hideki Kihara, Susumu Tauchi | 2010-03-09 |
| 7641069 | Vacuum processing apparatus | Susumu Tauchi | 2010-01-05 |
| 7416633 | Plasma processing apparatus | Hideki Kihara, Susumu Tauchi | 2008-08-26 |
| 7335277 | Vacuum processing apparatus | Youji Takahashi, Minoru Soraoka, Hideki Kihara, Susumu Tauchi | 2008-02-26 |
| 7322561 | Vacuum processing apparatus | Susumu Tauchi | 2008-01-29 |
| D557425 | Cover ring for a plasma processing apparatus | Tsutomu Nakamura, Susumu Tauchi | 2007-12-11 |
| D557226 | Electrode cover for a plasma processing apparatus | Takeo Uchino, Hiroyuki Shichida, Masakazu Isozaki, Tsunehiko Tsubone | 2007-12-11 |
| D556704 | Grounded electrode for a plasma processing apparatus | Tsutomu Nakamura, Susumu Tauchi | 2007-12-04 |
| 7247207 | Vacuum processing apparatus | Youji Takahashi, Minoru Soraoka, Hideki Kihara, Susumu Tauchi | 2007-07-24 |
| 7194821 | Vacuum processing apparatus and vacuum processing method | Manabu Edamura, Motohiko Yoshigai, Takanori Nakatsuka, Susumu Tauchi | 2007-03-27 |