Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11955360 | Electrostatic chuck and processing apparatus | Takeshi Takabatake, Tomohiro NAKASUJI, Akira Itoh, Kentaro Seto, Yutaka Omoto +1 more | 2024-04-09 |
| D1008986 | Ion shield plate for plasma processing apparatus | Yusuke Nakatani, Masahiro Yamaoka, Yasushi Sonoda, Taku Iwase | 2023-12-26 |
| 11710619 | Vacuum processing apparatus | Kohei Sato, Akitaka Makino, Yusaku Sakka | 2023-07-25 |
| D958401 | Ion shield plate for plasma processing device | — | 2022-07-19 |
| D868995 | Gas diffusion plate for a plasma processing apparatus | Kouji Okuda | 2019-12-03 |