Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11955360 | Electrostatic chuck and processing apparatus | Takeshi Takabatake, Tomohiro NAKASUJI, Akira Itoh, Kentaro Seto, Hiroho Kitada +1 more | 2024-04-09 |
| 9343336 | Plasma processing apparatus and plasma processing method | Kohei Sato, Kazunori Nakamoto | 2016-05-17 |
| 8920665 | Plasma processing apparatus and plasma processing method | Kohei Sato, Kazunori Nakamoto | 2014-12-30 |
| 6624084 | Plasma processing equipment and plasma processing method using the same | Kenji Maeda, Ichiro Sasaki, Hironobu Kawahara | 2003-09-23 |
| 6156663 | Method and apparatus for plasma processing | Katsuya Watanabe, Saburo Kanai, Ryoji Hamasaki, Tsuyoshi Yoshida, Masayuki Kojima +3 more | 2000-12-05 |
| 4943361 | Plasma treating method and apparatus therefor | Yutaka Kakehi, Takeshi Harada | 1990-07-24 |
| 4631106 | Plasma processor | Norio Nakazato, Yutaka Kakehi, Takeshi Harada, Ryoji Fukuyama, Makoto Nawata +3 more | 1986-12-23 |