Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7565879 | Plasma processing apparatus | Saburo Kanai, Kazue Takahashi, Kouichi Okamura, Satoshi Ito | 2009-07-28 |
| 7208422 | Plasma processing method | Saburo Kanai, Kazue Takahashi, Kouichi Okamura, Satoshi Ito | 2007-04-24 |
| 6156663 | Method and apparatus for plasma processing | Katsuya Watanabe, Saburo Kanai, Tsuyoshi Yoshida, Yutaka Omoto, Masayuki Kojima +3 more | 2000-12-05 |
| 5895586 | Plasma processing apparatus and plasma processing method in which a part of the processing chamber is formed using a pre-fluorinated material of aluminum | Tetsunori Kaji, Saburo Kanai, Satoshi Ito, Tetsuo Ono, Tatehito Usui +2 more | 1999-04-20 |
| 5874012 | Plasma processing apparatus and plasma processing method | Saburo Kanai, Kazue Takahashi, Kouichi Okamura, Satoshi Ito | 1999-02-23 |