| 9607874 |
Plasma processing apparatus |
Hiroyuki Kobayashi, Tomoyuki Tamura, Masaki Ishiguro, Shigeru Shirayone, Kazuyuki Ikenaga |
2017-03-28 |
| 8142567 |
Vacuum processing apparatus |
Hiroyuki Kobayashi, Kenji Maeda, Masaru Izawa |
2012-03-27 |
| 6444087 |
Plasma etching system |
Mamoru Yakushiji, Tomoyuki Tamura |
2002-09-03 |
| 6329298 |
Apparatus for treating samples |
Ryooji Fukuyama, Yutaka Kakehi, Hironobu Kawahara, Yoshiaki Sato, Yoshimi Torii +2 more |
2001-12-11 |
| 6328845 |
Plasma-processing method and an apparatus for carrying out the same |
Yutaka Ohmoto, Ryooji Fukuyama |
2001-12-11 |
| 5914051 |
Microwave plasma processing method and apparatus |
Saburo Kanai, Yoshinao Kawasaki, Kazuaki Ichihashi, Seiichi Watanabe |
1999-06-22 |
| 5804033 |
Microwave plasma processing method and apparatus |
Saburo Kanai, Yoshinao Kawasaki, Kazuaki Ichihashi, Seiichi Watanabe, Muneo Furuse +1 more |
1998-09-08 |
| 5785807 |
Microwave plasma processing method and apparatus |
Saburo Kanai, Yoshinao Kawasaki, Kazuaki Ichihashi, Seiichi Watanabe |
1998-07-28 |
| 5770100 |
Method of treating samples |
Ryooji Fukuyama, Yutaka Kakehi, Hironobu Kawahara, Yoshiaki Sato, Yoshimi Torii +2 more |
1998-06-23 |
| 5647944 |
Microwave plasma treatment apparatus |
Takeshi Tsubaki, Katsuya Watanabe, Hidenori Takesue, Yoshiaki Sato, Katsuyoshi Kudo |
1997-07-15 |
| 5556714 |
Method of treating samples |
Ryooji Fukuyama, Yutaka Kakehi, Hironobu Kawahara, Yoshiaki Sato, Yoshimi Torii +2 more |
1996-09-17 |
| 5520771 |
Microwave plasma processing apparatus |
Saburo Kanai, Yoshinao Kawasaki, Kazuaki Ichihashi, Seiichi Watanabe |
1996-05-28 |
| 5380397 |
Method of treating samples |
Ryooji Fukuyama, Yutaka Kakehi, Hironobu Kawahara, Yoshiaki Sato, Yoshimi Torii +2 more |
1995-01-10 |
| 5276386 |
Microwave plasma generating method and apparatus |
Seiichi Watanabe, Ryooji Fukuyama, Yutaka Kakehi, Saburo Kanai, Yoshinao Kawasaki |
1994-01-04 |
| 4971651 |
Microwave plasma processing method and apparatus |
Seiichi Watanabe, Ryooji Fukuyama, Yutaka Kakehi, Saburo Kanai, Keiji Ueyama |
1990-11-20 |
| 4631106 |
Plasma processor |
Norio Nakazato, Yutaka Kakehi, Takeshi Harada, Ryoji Fukuyama, Hironobu Ueda +3 more |
1986-12-23 |
| 4618398 |
Dry etching method |
Ryoji Fukuyama, Norio Nakazato, Masaharu Nishiumi |
1986-10-21 |
| 4530708 |
Air separation method and apparatus therefor |
Norio Nakazato, Sachihiro Yoshimatsu, Sadao Masuda |
1985-07-23 |
| 4459143 |
Temperature control method for reversing type heat exchanger group of air separation system |
Norio Nakazato, Sachihiro Yoshimatsu, Youichi Itou, Kengo Sugiyama, Yasuo Tasaka |
1984-07-10 |