Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5914051 | Microwave plasma processing method and apparatus | Saburo Kanai, Yoshinao Kawasaki, Seiichi Watanabe, Makoto Nawata | 1999-06-22 |
| 5804033 | Microwave plasma processing method and apparatus | Saburo Kanai, Yoshinao Kawasaki, Seiichi Watanabe, Makoto Nawata, Muneo Furuse +1 more | 1998-09-08 |
| 5785807 | Microwave plasma processing method and apparatus | Saburo Kanai, Yoshinao Kawasaki, Seiichi Watanabe, Makoto Nawata | 1998-07-28 |
| 5520771 | Microwave plasma processing apparatus | Saburo Kanai, Yoshinao Kawasaki, Seiichi Watanabe, Makoto Nawata | 1996-05-28 |
| 5259735 | Evacuation system and method therefor | Kazue Takahashi, Shinjiro Ueda, Manabu Edamura, Naoyuki Tamura | 1993-11-09 |
| 4810473 | Molecular beam epitaxy apparatus | Naoyuki Tamura, Hideaki Kamohara, Norio Kanai | 1989-03-07 |
| 4718681 | Sample chucking apparatus | Yutaka Kakehi, Ryokichi Kaji, Hideki Izumi, Toshiaki Makino, Sosuke Kawashima | 1988-01-12 |
| 4699554 | Vacuum processing apparatus | Sosuke Kawashima | 1987-10-13 |
| 4203841 | Apparatus for high-efficient microbiological oxidation treatment | Norio Shimizu, Youji Odawara, Tetsuo Yamaguchi, Setsuo Saitou, Azuma Nakaoka | 1980-05-20 |