Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4932357 | Vacuum apparatus | Naoyuki Tamura | 1990-06-12 |
| 4824309 | Vacuum processing unit and apparatus | Yutaka Kakehi, Norio Nakazato, Yoshimasa Fukushima, Fumio Shibata, Tsunehiko Tsubone | 1989-04-25 |
| 4810473 | Molecular beam epitaxy apparatus | Naoyuki Tamura, Hideaki Kamohara, Kazuaki Ichihashi | 1989-03-07 |
| 4352974 | Plasma etcher having isotropic subchamber with gas outlet for producing uniform etching | Tatsumi Mizutani, Kunio Harada, Hideo Komatsu, Shinya Iida | 1982-10-05 |
| 4274004 | Ion implanter | — | 1981-06-16 |