Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10056226 | Charged particle beam apparatus and vibration damper for charged particle beam apparatus | Motohiro TAKAHASHI, Katsunori Onuki, Tetsuya Niibori | 2018-08-21 |
| 8823309 | Stage device | Hironori Ogawa, Masahiro Koyama, Nobuo Shibata, Masaru Matsushima, Shuichi Nakagawa +1 more | 2014-09-02 |
| 7276709 | System and method for electron-beam lithography | Hiroshi Tsuji, Sayaka Tanimoto | 2007-10-02 |
| 6794665 | Electron beam drawing apparatus | Masaki Kurihara, Toshihiko Horiuchi, Masaki Mizuochi | 2004-09-21 |
| 6744054 | Evacuation use sample chamber and circuit pattern forming apparatus using the same | Masaki Mizuochi, Mitsuru Inoue | 2004-06-01 |
| 6730916 | Electron beam lithography apparatus | Hiroshi Tsuji, Mitsuru Inoue, Norio Saitou, Yasuhiro Someda | 2004-05-04 |
| 6659441 | Travelling worktable apparatus | Masaki Mizuochi, Masami Katsuyama, Toshinori Kobayashi | 2003-12-09 |
| 6446950 | Travelling worktable apparatus | Masaki Mizuochi, Masami Katsuyama, Toshinori Kobayashi | 2002-09-10 |
| 6281024 | Semiconductor device inspection and analysis method and its apparatus and a method for manufacturing a semiconductor device | Yasuhiro Yoshitake, Kenji Watanabe, Minori Noguchi | 2001-08-28 |
| 4824309 | Vacuum processing unit and apparatus | Yutaka Kakehi, Norio Nakazato, Fumio Shibata, Tsunehiko Tsubone, Norio Kanai | 1989-04-25 |
| 4565601 | Method and apparatus for controlling sample temperature | Yutaka Kakehi, Norio Nakazato, Kousai Hiratsuka, Fumio Shibata, Noriaki Yamamoto +1 more | 1986-01-21 |