Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400826 | Charged particle beam device | Hironori Ogawa, Motohiro TAKAHASHI, Takanori Kato | 2025-08-26 |
| 12014897 | Ventilated semiconductor processing apparatus | Akira Nishioka, Shuichi Nakagawa, Takaaki Kikuchi, Masashi Fujita, Kenta Nomura +1 more | 2024-06-18 |
| D989830 | Semiconductor substrate transfer apparatus | Masayuki Arakawa, Junpei Hokari, Akira Kojima, Tomokazu Kobayashi, Takaaki Kikuchi | 2023-06-20 |
| D989831 | Apparatus for evaluating semiconductor substrate | Masayuki Arakawa, Junpei Hokari, Akira Kojima, Tomokazu Kobayashi, Takaaki Kikuchi | 2023-06-20 |
| D989144 | Apparatus for evaluating semiconductor substrate | Masayuki Arakawa, Junpei Hokari, Akira Kojima, Tomokazu Kobayashi, Takaaki Kikuchi | 2023-06-13 |
| 11418101 | Linear motor for vacuum and vacuum processing apparatus | Tomotaka SHIBAZAKI | 2022-08-16 |
| 11380515 | Charged particle beam device | Keiichiro HOSOBUCHI, Shuichi Nakagawa, Tomotaka SHIBAZAKI, Takaaki Kikuchi | 2022-07-05 |
| 11342156 | Charged particle beam apparatus, sample alignment method of charged particle beam apparatus | Hironori Ogawa, Shuichi Nakagawa, Motohiro TAKAHASHI | 2022-05-24 |
| 11049687 | Stage apparatus and charged particle beam apparatus | Motohiro TAKAHASHI, Shuichi Nakagawa, Tomotaka SHIBAZAKI, Naruo Watanabe, Hironori Ogawa +2 more | 2021-06-29 |
| 10879033 | Stage apparatus, and charged particle beam apparatus | Akira Nishioka, Shuichi Nakagawa, Tomotaka SHIBAZAKI, Hironori Ogawa, Naruo Watanabe +2 more | 2020-12-29 |
| 10840059 | Charged particle radiation device | Kentaro SHIGEOKA, Takanori Kato, Kazuhiro Morita, Motohiro TAKAHASHI, Shuichi Nakagawa +1 more | 2020-11-17 |
| 10804067 | Charged particle beam apparatus comprising a controller to set control parameters based on movement of the sample stage | Takanori Kato, Motohiro TAKAHASHI, Naruo Watanabe, Akira Nishioka, Shuichi Nakagawa +1 more | 2020-10-13 |
| 10770259 | Stage device and charged particle beam device | Motohiro TAKAHASHI, Shuichi Nakagawa, Hironori Ogawa, Takanori Kato | 2020-09-08 |
| 10658151 | Stage device and charged particle beam device | Motohiro TAKAHASHI, Shuichi Nakagawa, Tomotaka SHIBAZAKI, Naruo Watanabe, Akira Nishioka +2 more | 2020-05-19 |
| 10600614 | Stage device and charged particle beam device | Motohiro TAKAHASHI, Shuichi Nakagawa, Tomotaka SHIBAZAKI, Hironori Ogawa, Naruo Watanabe +1 more | 2020-03-24 |
| 10366912 | Stage apparatus and charged particle beam apparatus | Motohiro TAKAHASHI, Shuichi Nakagawa, Naruo Watanabe, Hironori Ogawa, Takanori Kato +1 more | 2019-07-30 |
| 9905393 | Stage apparatus with braking system for lens, beam, or vibration compensation | Hironori Ogawa, Shuichi Nakagawa, Motohiro TAKAHASHI, Takanori Kato | 2018-02-27 |
| 9887064 | Stage device and charged particle beam device using the same | Akira Nishioka, Shuichi Nakagawa, Nobuyuki Maki | 2018-02-06 |
| 9734983 | Charged particle radiation apparatus | Daisuke Mutou, Shuichi Nakagawa, Toshihiko Shimizu, Hirofumi Motoshiromizu, Eisuke Kamide | 2017-08-15 |
| 9627173 | Stage device and charged particle beam apparatus using the stage device | Hironori Ogawa, Shuichi Nakagawa, Tsukasa Sugawara | 2017-04-18 |
| 9502208 | Charged particle beam apparatus, stage controlling method, and stage system | Akira Nishioka, Shuichi Nakagawa, Hironori Ogawa | 2016-11-22 |
| 9368320 | Stage apparatus, and charged particle beam apparatus using same | Akira Nishioka, Shuichi Nakagawa, Hiroshi Tsuji | 2016-06-14 |
| 9093890 | Linear motor, movable stage and electron microscope | Hideki Tanaka, Masahiro Koyama, Hiroshi Tsuji | 2015-07-28 |
| 8946652 | Sample positioning apparatus, sample stage, and charged particle beam apparatus | Motohiro TAKAHASHI, Hironori Ogawa, Nobuo Shibata, Shuichi Nakagawa, Hiroshi Tsuji | 2015-02-03 |
| 8880374 | Charged particle beam device | — | 2014-11-04 |