Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8158955 | Charged particle beam application apparatus | Shoji Tomida | 2012-04-17 |
| 7763863 | Charged particle beam application apparatus | Shoji Tomida | 2010-07-27 |
| 6794665 | Electron beam drawing apparatus | Masaki Kurihara, Toshihiko Horiuchi, Yoshimasa Fukushima | 2004-09-21 |
| 6744054 | Evacuation use sample chamber and circuit pattern forming apparatus using the same | Yoshimasa Fukushima, Mitsuru Inoue | 2004-06-01 |
| 6659441 | Travelling worktable apparatus | Yoshimasa Fukushima, Masami Katsuyama, Toshinori Kobayashi | 2003-12-09 |
| 6446950 | Travelling worktable apparatus | Yoshimasa Fukushima, Masami Katsuyama, Toshinori Kobayashi | 2002-09-10 |