TS

Tomotaka SHIBAZAKI

HH Hitachi High-Technologies: 6 patents #968 of 1,917Top 55%
Overall (All Time): #817,491 of 4,157,543Top 20%
6
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
11418101 Linear motor for vacuum and vacuum processing apparatus Masaki Mizuochi 2022-08-16
11380515 Charged particle beam device Keiichiro HOSOBUCHI, Masaki Mizuochi, Shuichi Nakagawa, Takaaki Kikuchi 2022-07-05
11049687 Stage apparatus and charged particle beam apparatus Motohiro TAKAHASHI, Masaki Mizuochi, Shuichi Nakagawa, Naruo Watanabe, Hironori Ogawa +2 more 2021-06-29
10879033 Stage apparatus, and charged particle beam apparatus Akira Nishioka, Masaki Mizuochi, Shuichi Nakagawa, Hironori Ogawa, Naruo Watanabe +2 more 2020-12-29
10658151 Stage device and charged particle beam device Motohiro TAKAHASHI, Masaki Mizuochi, Shuichi Nakagawa, Naruo Watanabe, Akira Nishioka +2 more 2020-05-19
10600614 Stage device and charged particle beam device Motohiro TAKAHASHI, Masaki Mizuochi, Shuichi Nakagawa, Hironori Ogawa, Naruo Watanabe +1 more 2020-03-24