Issued Patents All Time
Showing 1–25 of 114 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11561184 | Support system for specified inspection, support method for specified inspection, and non-transitory computer readable medium | Nobuyoshi TADA, Shigeya Tanaka, Yuusuke OOMINAMI, Maya Goto | 2023-01-24 |
| 9551670 | Surface inspection apparatus and method thereof | Ichiro Ishimaru, Ichiro Moriyama, Yoshikazu Tanabe, Yasuo Yatsugake, Yukio Kenbou +2 more | 2017-01-24 |
| 9261475 | Inspection equipment and inspection method | Masami Makuuchi, Hiroshi Kawaguchi | 2016-02-16 |
| 8823929 | Inspection apparatus | Masaaki Ito, Shigeru Matsui | 2014-09-02 |
| 8804109 | Defect inspection system | Kenji Aiko, Shuichi Chikamatsu, Hisafumi Iwata | 2014-08-12 |
| 8760643 | Apparatus and method for inspecting defect in object surface | Sachio Uto, Hidetoshi Nishiyama | 2014-06-24 |
| 8729514 | Surface inspection apparatus and method thereof | Ichiro Ishimaru, Ichiro Moriyama, Yoshikazu Tanabe, Yasuo Yatsugake, Yukio Kenbou +2 more | 2014-05-20 |
| 8559000 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomiya +4 more | 2013-10-15 |
| 8542354 | Inspection apparatus | Masaaki Ito, Shigeru Matsui | 2013-09-24 |
| 8508727 | Defects inspecting apparatus and defects inspecting method | Sachio Uto, Hidetoshi Nishiyama, Yoshimasa Ohshima, Akira Hamamatsu, Takahiro Jingu +2 more | 2013-08-13 |
| 8482728 | Apparatus and method for inspecting defect on object surface | Sachio Uto, Hidetoshi Nishiyama | 2013-07-09 |
| 8467048 | Pattern defect inspection apparatus and method | Hidetoshi Nishiyama, Kei Shimura, Sachio Uto | 2013-06-18 |
| 8319960 | Defect inspection system | Kenji Aiko, Shuichi Chikamatsu, Hisafumi Iwata | 2012-11-27 |
| 8289507 | Method of apparatus for detecting particles on a specimen | Akira Hamamatsu, Yoshimasa Ohshima, Sachio Uto, Taketo Ueno, Hiroyuki Nakano +5 more | 2012-10-16 |
| 8274651 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomiya +4 more | 2012-09-25 |
| 8269959 | Inspection method and inspection apparatus | Akira Hamamatsu, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu, Sachio Uto | 2012-09-18 |
| 8254662 | System for monitoring foreign particles, process processing apparatus and method of electronic commerce | Hidetoshi Nishiyama, Tetsuya Watanabe, Takuaki Sekiguchi | 2012-08-28 |
| 8233145 | Pattern defect inspection apparatus and method | Hidetoshi Nishiyama, Kei Shimura, Sachio Uto | 2012-07-31 |
| 8228495 | Defects inspecting apparatus and defects inspecting method | Sachio Uto, Hidetoshi Nishiyama, Yoshimasa Ohshima, Akira Hamamatsu, Takahiro Jingu +2 more | 2012-07-24 |
| 8228496 | Defect inspection method and defect inspection apparatus | Shuichi Chikamatsu, Masayuki Ochi, Kenji Aiko | 2012-07-24 |
| 8134701 | Defect inspecting method and apparatus | Shuichi Chikamatsu, Kenji Aiko | 2012-03-13 |
| 8094295 | Inspection method and inspection apparatus | Akira Hamamatsu, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu, Sachio Uto | 2012-01-10 |
| 8072597 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Yoshimasa Ooshima, Akira Hamamatsu, Kenji Watanabe, Tetsuya Watanabe +1 more | 2011-12-06 |
| 8045148 | System for monitoring foreign particles, process processing apparatus and method of electronic commerce | Hidetoshi Nishiyama, Tetsuya Watanabe, Takuaki Sekiguchi | 2011-10-25 |
| 8040503 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomiya +4 more | 2011-10-18 |