Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9551670 | Surface inspection apparatus and method thereof | Ichiro Ishimaru, Minori Noguchi, Ichiro Moriyama, Yoshikazu Tanabe, Yukio Kenbou +2 more | 2017-01-24 |
| 8729514 | Surface inspection apparatus and method thereof | Ichiro Ishimaru, Minori Noguchi, Ichiro Moriyama, Yoshikazu Tanabe, Yukio Kenbou +2 more | 2014-05-20 |
| 7952085 | Surface inspection apparatus and method thereof | Ichiro Ishimaru, Minori Noguchi, Ichiro Moriyama, Yoshikazu Tanabe, Yukio Kenbou +2 more | 2011-05-31 |
| 7417244 | Surface inspection apparatus and method thereof | Ichiro Ishimaru, Minori Noguchi, Ichiro Moriyama, Yoshikazu Tanabe, Yukio Kenbou +2 more | 2008-08-26 |
| 7242016 | Surface inspection apparatus and method thereof | Ichiro Ishimaru, Minori Noguchi, Ichiro Moriyama, Yoshikazu Tanabe, Yukio Kenbou +2 more | 2007-07-10 |
| 6894302 | Surface inspection apparatus and method thereof | Ichiro Ishimaru, Minori Noguchi, Ichiro Moriyama, Yoshikazu Tanabe, Yukio Kenbou +2 more | 2005-05-17 |
| 5903342 | Inspection method and device of wafer surface | Takashi Okawa, Norihiko Mizutani, Shigeharu Iizuka | 1999-05-11 |
| 4685802 | Small particle detection system | Susumu Saito, Michio Suzuki, Kyo Suda, Kazuya Tsukada | 1987-08-11 |
| 4464011 | Light beam scanning apparatus and the method | Kensaku Takahashi, Fukuo Iwaya, Makoto Ito, Katsumi Takami, Kyo Suda | 1984-08-07 |