Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5903342 | Inspection method and device of wafer surface | Yasuo Yatsugake, Takashi Okawa, Norihiko Mizutani | 1999-05-11 |
| 5851102 | Device and method for positioning a notched wafer | Takashi Okawa | 1998-12-22 |