Issued Patents All Time
Showing 1–25 of 66 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818471 | Charged particle beam device | — | 2020-10-27 |
| 10444011 | Sample for coordinates calibration and method for fabricating the same | — | 2019-10-15 |
| 10261026 | Defect inspection method, low light detecting method, and low light detector | Yuta Urano, Toshifumi Honda | 2019-04-16 |
| 9885670 | Inspection apparatus and adjusting method | — | 2018-02-06 |
| 9823065 | Surface measurement apparatus | Takanori Kondo, Masaaki Ito, Masami Ikota | 2017-11-21 |
| 9791380 | Inspection device and image capture element | — | 2017-10-17 |
| 9779912 | Inspection device and measurement device | Masami Makuuchi | 2017-10-03 |
| 9759669 | Inspection device | — | 2017-09-12 |
| 9645094 | Defect inspection device and defect inspection method | Toshifumi Honda, Yuta Urano, Akira Hamamatsu | 2017-05-09 |
| 9602780 | Apparatus for inspecting defect with time/spatial division optical system | Masaaki Ito, Hidetoshi Nishiyama | 2017-03-21 |
| 9588054 | Defect inspection method, low light detecting method and low light detector | Yuta Urano, Toshifumi Honda | 2017-03-07 |
| 9568439 | Defect inspection device and defect inspection method | Toshifumi Honda, Yuta Urano, Akira Hamamatsu | 2017-02-14 |
| 9568437 | Inspection device | Shunichi Matsumoto, Akira Hamamatsu | 2017-02-14 |
| 9535009 | Inspection system | Kenshiro OHTSUBO, Hidetoshi Nishiyama, Masaaki Ito | 2017-01-03 |
| 9366625 | Surface measurement device | Masaaki Ito, Takanori Kondo | 2016-06-14 |
| 9329136 | Defect inspection device and defect inspection method | Toshifumi Honda, Yuta Urano, Akira Hamamatsu | 2016-05-03 |
| 9310190 | Surface shape measuring apparatus | Masaaki Ito, Hisashi Hatano | 2016-04-12 |
| 9019490 | Surface-defect inspection device | Katsuya Suzuki | 2015-04-28 |
| 9007581 | Inspection method and inspection device | Izuo Horai, Hirokazu Koyabu, Yuta Urano | 2015-04-14 |
| 8958076 | Surface shape measuring apparatus | Kazuo Takahashi | 2015-02-17 |
| 8908171 | Defect inspection method and defect inspection device | Masami Makuuchi | 2014-12-09 |
| 8902417 | Inspection apparatus | Nobuaki Hirose, Hidetoshi Nishiyama, Kazuo Takahashi, Hisashi Hatano | 2014-12-02 |
| 8884207 | Photoelectric conversion element, defect inspecting apparatus, and defect inspecting method | Hiroshi Kawaguchi | 2014-11-11 |
| 8831899 | Inspecting apparatus and an inspecting method | Kazunori Nemoto, Akira Hamamatsu, Hideo Ota, Kenji Oka | 2014-09-09 |
| 8587777 | Examination method and examination device | Kazuo Takahashi | 2013-11-19 |