Issued Patents All Time
Showing 51–66 of 66 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7417721 | Defect detector and defect detecting method | Sachio Uto, Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Akira Hamamatsu +2 more | 2008-08-26 |
| 7411207 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Minori Noguchi, Yoshimasa Ohshima, Akira Hamamatsu, Kenji Watanabe +1 more | 2008-08-12 |
| 7369223 | Method of apparatus for detecting particles on a specimen | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Sachio Uto, Taketo Ueno +5 more | 2008-05-06 |
| 7315363 | Inspection method and inspection apparatus | Akira Hamamatsu, Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Sachio Uto | 2008-01-01 |
| 7262425 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Minori Noguchi, Yoshimasa Ohshima, Akira Hamamatsu, Kenji Watanabe +1 more | 2007-08-28 |
| 7256412 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Minori Noguchi, Yoshimasa Ooshima, Akira Hamamatsu, Kenji Watanabe +1 more | 2007-08-14 |
| 7248352 | Method for inspecting defect and apparatus for inspecting defect | Akira Hamamatsu, Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Sachio Uto | 2007-07-24 |
| 7115892 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Minori Noguchi, Yoshimasa Ooshima, Akira Hamamatsu, Kenji Watanabe +1 more | 2006-10-03 |
| 7098055 | Apparatus and method for testing defects | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo +7 more | 2006-08-29 |
| 7037735 | Apparatus and method for testing defects | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo +7 more | 2006-05-02 |
| 6998630 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Minori Noguchi, Yoshimasa Ooshima, Akira Hamamatsu, Kenji Watanabe +1 more | 2006-02-14 |
| 6936835 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Minori Noguchi, Yoshimasa Ohshima, Akira Hamamatsu, Kenji Watanabe +1 more | 2005-08-30 |
| 6797975 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Minori Noguchi, Yoshimasa Ooshima, Akira Hamamatsu, Kenji Watanabe +1 more | 2004-09-28 |
| 6597448 | Apparatus and method of inspecting foreign particle or defect on a sample | Hidetoshi Nishiyama, Minori Noguchi, Yoshimasa Ohshima, Tetsuya Watanabe, Hisato Nakamura +3 more | 2003-07-22 |
| 6411377 | Optical apparatus for defect and particle size inspection | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo +7 more | 2002-06-25 |
| 6002989 | System for quality control where inspection frequency of inspection apparatus is reset to minimize expected total loss based on derived frequency function and loss value | Masataka Shiba, Kenji Watanabe, Toshimitsu Hamada, Seiji Ishikawa, Naoki Go +2 more | 1999-12-14 |