Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7604925 | Exposure apparatus and method | Minori Noguchi, Yukio Kenbo, Yoshitada Oshida, Yasuhiro Yoshitaka, Makoto Murayama | 2009-10-20 |
| 7598020 | Exposure apparatus and method | Minori Noguchi, Yukio Kenbo, Yoshitada Oshida, Yasuhiro Yoshitaka, Makoto Murayama | 2009-10-06 |
| 7277155 | Exposure apparatus and method | Minori Noguchi, Yukio Kenbo, Yoshitada Oshida, Yasuhiro Yoshitaka, Makoto Murayama | 2007-10-02 |
| 7012671 | Exposure apparatus and method | Minori Noguchi, Yukio Kenbo, Yoshitada Oshida, Yasuhiro Yoshitaka, Makoto Murayama | 2006-03-14 |
| 6757621 | Process management system | Fumio Mizuno, Seiji Isogai, Kenji Watanabe, Yasuhiro Yoshitake, Terushige Asakawa +12 more | 2004-06-29 |
| 6650409 | Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same system | Minori Noguchi, Yukio Kembo, Hiroshi Morioka, Hidetoshi Nishiyama, Hideaki Doi +6 more | 2003-11-18 |
| 6556955 | Method of determining lethality of defects in circuit pattern inspection, method of selecting defects to be reviewed, and inspection system of circuit patterns involved with the methods | Yasuhiro Yoshitake, Atsushi Shimoda | 2003-04-29 |
| 6542830 | Process control system | Fumio Mizuno, Seiji Isogai, Kenji Watanabe, Yasuhiro Yoshitake, Terushige Asakawa +12 more | 2003-04-01 |
| 6485891 | Exposure apparatus and method | Minori Noguchi, Yukio Kenbo, Yoshitada Oshida, Yasuhiro Yoshitaka, Makoto Murayama | 2002-11-26 |
| 6456951 | Method and apparatus for processing inspection data | Shunji Maeda, Yasuhiro Yoshitake, Kenji Oka, Atsushi Shimoda | 2002-09-24 |
| 6335146 | Exposure apparatus and method | Minori Noguchi, Yukio Kenbo, Yoshitada Oshida, Yasuhiro Yoshitaka, Makoto Murayama | 2002-01-01 |
| 6334097 | Method of determining lethality of defects in circuit pattern inspection method of selecting defects to be reviewed and inspection system of circuit patterns involved with the methods | Yasuhiro Yoshitake, Atsushi Shimoda | 2001-12-25 |
| 6016187 | Exposure apparatus and method | Minori Noguchi, Yukio Kenbo, Yoshitada Oshida, Yasuhiro Yoshitaka, Makoto Murayama | 2000-01-18 |
| 6002989 | System for quality control where inspection frequency of inspection apparatus is reset to minimize expected total loss based on derived frequency function and loss value | Kenji Watanabe, Toshimitsu Hamada, Seiji Ishikawa, Naoki Go, Toshiaki Yachi +2 more | 1999-12-14 |
| 5767949 | Exposure apparatus and method | Minori Noguchi, Yukio Kenbo, Yoshitada Oshida, Yasuhiro Yoshitaka, Makoto Murayama | 1998-06-16 |
| 5747201 | Controlling method of forming thin film, system for said controlling method, exposure method and system for said exposure method | Yasuhiko Nakayama, Susumu Komoriya | 1998-05-05 |
| 5526094 | Exposure apparatus and method | Minori Noguchi, Yukio Kenbo, Yoshitada Oshida, Yasuhiro Yoshitaka, Makoto Murayama | 1996-06-11 |
| 5409538 | Controlling method of forming thin film, system for said controlling method, exposure method and system for said exposure method | Yasuhiko Nakayama, Susumu Komoriya | 1995-04-25 |
| 5329333 | Exposure apparatus and method | Minori Noguchi, Yukio Kenbo, Yoshitada Oshida, Yasuhiro Yoshitaka, Makoto Murayama | 1994-07-12 |
| 5324953 | Reduced-projection exposure system with chromatic aberration correction system including diffractive lens such as holographic lens | Yasuhiro Yoshitake, Yoshitada Oshida, Yasuhiko Nakayama | 1994-06-28 |
| 5195070 | Optical information processing apparatus and optical pickup therefor | Kazumi Kawamoto, Yasuo Hira, Akira Inagaki, Hidemi Sato, Kenchi Ito +2 more | 1993-03-16 |
| 5191624 | Optical information storing apparatus and method for production of optical deflector | Kenchi Ito, Kazumi Kawamoto, Naoya Kanda, Yasuo Hira, Hidemi Sato +3 more | 1993-03-02 |
| 5187756 | Surface acoustic waveguide device and manufacturing method | Akira Inagaki, Minoru Yoshida, Kenchi Ito, Kazumi Kawamoto | 1993-02-16 |
| 5153916 | Method and apparatus for detecting focal plane | Akira Inagaki, Yoshihiko Aiba | 1992-10-06 |
| RE33991 | Foreign particle detecting method and apparatus | Sachio Uto, Mitsuyoshi Koizumi | 1992-07-14 |