Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6757621 | Process management system | Fumio Mizuno, Seiji Isogai, Kenji Watanabe, Yasuhiro Yoshitake, Yuichi Ohyama +12 more | 2004-06-29 |
| 6542830 | Process control system | Fumio Mizuno, Seiji Isogai, Kenji Watanabe, Yasuhiro Yoshitake, Yuichi Ohyama +12 more | 2003-04-01 |
| 4780606 | Projection aligner method utilizing monitoring of light quantity | Koyo Morita, Keizo Nomura, Hiroshi Nishizuka, Tai Hoshi, Yoichiro Tamiya | 1988-10-25 |
| 4701608 | Projection aligner with a sensor for monitoring light quantity | Koyo Morita, Keizo Nomura, Hiroshi Nishizuka, Tai Hoshi, Yoichiro Tamiya | 1987-10-20 |
| 4598197 | Projection aligner | Koyo Morita, Keizo Nomura, Hiroshi Nishizuka, Tai Hoshi, Yoichiro Tamiya | 1986-07-01 |