Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6740171 | Manufacturing method of semiconductor integrated circuit device | Yutaka Shimada, Yasuhiro Mori, Kenji Yokoshima | 2004-05-25 |
| 5229569 | Laser machining apparatus and method of the same | Tateoki Miyauchi, Shigenobu Maruyama, Katsurou Mizukoshi, Mikio Hongo, Kaoru Katayama +3 more | 1993-07-20 |
| 5208437 | Method of cutting interconnection pattern with laser and apparatus thereof | Tateoki Miyauchi, Mikio Hongo, Shigenobu Maruyama, Katsurou Mizukoshi, Hiroshi Yamaguchi | 1993-05-04 |
| 4780606 | Projection aligner method utilizing monitoring of light quantity | Keizo Nomura, Hiroshi Nishizuka, Tai Hoshi, Yoichiro Tamiya, Terushige Asakawa | 1988-10-25 |
| 4701608 | Projection aligner with a sensor for monitoring light quantity | Keizo Nomura, Hiroshi Nishizuka, Tai Hoshi, Yoichiro Tamiya, Terushige Asakawa | 1987-10-20 |
| 4598197 | Projection aligner | Keizo Nomura, Hiroshi Nishizuka, Tai Hoshi, Yoichiro Tamiya, Terushige Asakawa | 1986-07-01 |
| 4298273 | Projection aligner and method of positioning a wafer | Hiroshi Nishizuka, Susumu Komoriya, Takayoshi Osakaya | 1981-11-03 |
| 4218136 | Method of and apparatus for aligning photomask | Susumu Komoriya, Hiroshi Nishizuka, Hisashi Maejima | 1980-08-19 |