Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7212286 | Aligning method, exposure method, exposure apparatus, and device manufacturing method | — | 2007-05-01 |
| 6876435 | Exposure method, plane alignment method, exposure apparatus, and device manufacturing method | Yoshiharu Kataoka | 2005-04-05 |
| 6399283 | Exposure method and aligner | — | 2002-06-04 |
| 4780606 | Projection aligner method utilizing monitoring of light quantity | Koyo Morita, Keizo Nomura, Hiroshi Nishizuka, Yoichiro Tamiya, Terushige Asakawa | 1988-10-25 |
| 4701608 | Projection aligner with a sensor for monitoring light quantity | Koyo Morita, Keizo Nomura, Hiroshi Nishizuka, Yoichiro Tamiya, Terushige Asakawa | 1987-10-20 |
| 4598197 | Projection aligner | Koyo Morita, Keizo Nomura, Hiroshi Nishizuka, Yoichiro Tamiya, Terushige Asakawa | 1986-07-01 |