Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE40139 | Wafer having chamfered bend portions in the joint regions between the contour of the cut-away portion of the wafer | Hisashi Maejima, Susumu Komoriya, Etuo Egashira | 2008-03-04 |
| 5279992 | Method of producing a wafer having a curved notch | Hisashi Maejima, Susumu Komoriya, Etuo Egashira | 1994-01-18 |
| 5230747 | Wafer having chamfered bend portions in the joint regions between the contour of the wafer and the cut-away portion of the wafer | Hisashi Maejima, Susumu Komoriya, Etuo Egashira | 1993-07-27 |
| 5025284 | Exposure method and exposure apparatus | Susumu Komoriya, Shinya Nakagawa, Hisashi Maejima | 1991-06-18 |
| 4974018 | Exposure method and exposure apparatus | Susumu Komoriya, Shinya Nakagawa, Hisashi Maejima | 1990-11-27 |
| 4783225 | Wafer and method of working the same | Hisashi Maejima, Susumu Komoriya, Etuo Egashira | 1988-11-08 |
| 4780606 | Projection aligner method utilizing monitoring of light quantity | Koyo Morita, Keizo Nomura, Tai Hoshi, Yoichiro Tamiya, Terushige Asakawa | 1988-10-25 |
| 4701608 | Projection aligner with a sensor for monitoring light quantity | Koyo Morita, Keizo Nomura, Tai Hoshi, Yoichiro Tamiya, Terushige Asakawa | 1987-10-20 |
| 4699505 | Exposure method and exposure apparatus | Susumu Komoriya, Shinya Nakagawa, Hisashi Maejima | 1987-10-13 |
| 4598197 | Projection aligner | Koyo Morita, Keizo Nomura, Tai Hoshi, Yoichiro Tamiya, Terushige Asakawa | 1986-07-01 |
| 4298273 | Projection aligner and method of positioning a wafer | Susumu Komoriya, Koyo Morita, Takayoshi Osakaya | 1981-11-03 |
| 4218136 | Method of and apparatus for aligning photomask | Susumu Komoriya, Koyo Morita, Hisashi Maejima | 1980-08-19 |