Issued Patents All Time
Showing 1–25 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8304724 | Microstructured pattern inspection method | Fumihiro Sasajima, Osamu Komuro | 2012-11-06 |
| 8217466 | High-speed semiconductor device and method for manufacturing the same | Kanji Otsuka, Munekazu Takano, Tamotsu Usami | 2012-07-10 |
| 7804111 | Semiconductor device and method for adjusting characteristics thereof | Kanji Otsuka, Munekazu Takano, Saburo Yokokura, Tsuneo Ito, Yuko Tanba +1 more | 2010-09-28 |
| 7791021 | Microstructured pattern inspection method | Fumihiro Sasajima, Osamu Komuro | 2010-09-07 |
| 7642514 | Charged particle beam apparatus | Atsushi Takane, Haruo Yoda, Hideo Todokoro, Shoji Yoshida, Mitsuji Ikeda +2 more | 2010-01-05 |
| 7435959 | Microstructured pattern inspection method | Fumihiro Sasajima, Osamu Komuro | 2008-10-14 |
| 7329868 | Charged particle beam apparatus | Atsushi Takane, Haruo Yoda, Hideo Todokoro, Shoji Yoshida, Mitsuji Ikeda +2 more | 2008-02-12 |
| 7217923 | Microstructured pattern inspection method | Fumihiro Sasajima, Osamu Komuro | 2007-05-15 |
| 7109485 | Charged particle beam apparatus | Atsushi Takane, Haruo Yoda, Hideo Todokoro, Shoji Yoshida, Mitsuji Ikeda +2 more | 2006-09-19 |
| 6936818 | Charged particle beam apparatus | Atsushi Takane, Haruo Yoda, Hideo Todokoro, Shoji Yoshida, Mitsuji Ikeda +2 more | 2005-08-30 |
| 6936819 | Microstructured pattern inspection method | Fumihiro Sasajima, Osamu Komuro | 2005-08-30 |
| 6765204 | Microstructured pattern inspection method | Fumihiro Sasajima, Osamu Komuro | 2004-07-20 |
| 6757621 | Process management system | Seiji Isogai, Kenji Watanabe, Yasuhiro Yoshitake, Terushige Asakawa, Yuichi Ohyama +12 more | 2004-06-29 |
| 6653633 | Charged particle beam apparatus | Atsushi Takane, Haruo Yoda, Hideo Todokoro, Shoji Yoshida, Mitsuji Ikeda +2 more | 2003-11-25 |
| 6573499 | Microstructured pattern inspection method | Fumihiro Sasajima, Osamu Komuro | 2003-06-03 |
| 6542830 | Process control system | Seiji Isogai, Kenji Watanabe, Yasuhiro Yoshitake, Terushige Asakawa, Yuichi Ohyama +12 more | 2003-04-01 |
| 6538249 | Image-formation apparatus using charged particle beams under various focus conditions | Atsushi Takane, Haruo Yoda, Hideo Todokoro, Shoji Yoshida, Mitsuji Ikeda +2 more | 2003-03-25 |
| RE37996 | Manufacturing method or an exposing method for a semiconductor device or a semiconductor integrated circuit device and a mask used therefor | Noboru Moriuchi, Seiichiro Shirai, Masayuki Morita | 2003-02-18 |
| 6157451 | Sample CD measurement system | — | 2000-12-05 |
| 6114695 | Scanning electron microscope and method for dimension measuring by using the same | Hideo Todokoro, Kenji Takamoto, Tadashi Otaka, Satoru Yamada, Sadao Terakado +3 more | 2000-09-05 |
| 6072178 | Sample analyzing apparatus | — | 2000-06-06 |
| 6067153 | Pattern defect inspecting apparatus | — | 2000-05-23 |
| 6047083 | Method of and apparatus for pattern inspection | — | 2000-04-04 |
| 5969357 | Scanning electron microscope and method for dimension measuring by using the same | Hideo Todokoro, Kenji Takamoto, Tadashi Otaka, Satoru Yamada, Sadao Terakado +3 more | 1999-10-19 |
| 5959011 | Resist removing method, and curable pressure-sensitive adhesive, adhesive sheets and apparatus used for the method | Noburu Moriuchi, Seiichiro Shirai, Yutaka Moroishi, Makoto Sunakawa, Michirou Kawanishi | 1999-09-28 |