| 6794118 |
Process for fabricating semiconductor integrated circuit device, and exposing system and mask inspecting method to be used in the process |
Yoshihiko Okamoto |
2004-09-21 |
| RE38296 |
Semiconductor memory device with recessed array region |
Yoshiki Yamaguchi, Toshihiko Tanaka, Norio Hasegawa, Yoshifumi Kawamoto, Shin Kimura +2 more |
2003-11-04 |
| RE37996 |
Manufacturing method or an exposing method for a semiconductor device or a semiconductor integrated circuit device and a mask used therefor |
Fumio Mizuno, Seiichiro Shirai, Masayuki Morita |
2003-02-18 |
| 6153357 |
Process for fabricating semiconductor integrated circuit device, and exposing system and mask inspecting method to be used in the process |
Yoshihiko Okamoto |
2000-11-28 |
| 5753416 |
Process for fabricating semiconductor integrated circuit device, and exposing system and mask inspecting method to be used in the process |
Yoshihiko Okamoto |
1998-05-19 |
| 5736300 |
Manufacturing method or an exposing method for a semiconductor device or a semiconductor integrated circuit device and a mask used therefor |
Fumio Mizuno, Seiichiro Shirai, Masayuki Morita |
1998-04-07 |
| 5725971 |
Method of manufacturing phase shift masks and a method of manufacturing semiconductor integrated circuit devices |
Seiichirou Shirai, Toshihiko Onozuka |
1998-03-10 |
| 5667941 |
Process for fabricating semiconductor integrated circuit device, and exposing system and mask inspecting method to be used in the process |
Yoshihiko Okamoto |
1997-09-16 |
| 5578422 |
Manufacturing method or an exposing method for a semiconductor device or a semiconductor integrated circuit device and a mask used therefor |
Fumio Mizuno, Seiichiro Shirai, Masayuki Morita |
1996-11-26 |
| 5466325 |
Resist removing method, and curable pressure-sensitive adhesive, adhesive sheets and apparatus used for the method |
Fumio Mizuno, Seiichiro Shirai, Yutaka Moroishi, Makoto Sunakawa, Michirou Kawanishi |
1995-11-14 |
| 5455144 |
Process for fabricating semiconductor integrated circuit device, and exposing system and mask inspecting method to be used in the process |
Yoshihiko Okamoto |
1995-10-03 |
| 5436095 |
Manufacturing method or an exposing method for a semiconductor device for a semiconductor integrated circuit device and a mask used therefor |
Fumio Mizuno, Seiichiro Shirai, Masayuki Morita |
1995-07-25 |
| 5405810 |
Alignment method and apparatus |
Fumio Mizuno, Seiichiro Shirai |
1995-04-11 |
| 5298365 |
Process for fabricating semiconductor integrated circuit device, and exposing system and mask inspecting method to be used in the process |
Yoshihiko Okamoto |
1994-03-29 |
| 5196910 |
Semiconductor memory device with recessed array region |
Yoshiki Yamaguchi, Toshihiko Tanaka, Norio Hasegawa, Yoshifumi Kawamoto, Shin Kimura +2 more |
1993-03-23 |
| 4882289 |
Method of making a semiconductor memory device with recessed array region |
Yoshiki Yamaguchi, Toshihiko Tanaka, Norio Hasegawa, Yoshifumi Kawamoto, Shin Kimura +2 more |
1989-11-21 |