Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9390934 | Phase shift mask, method of forming asymmetric pattern, method of manufacturing diffraction grating, and method of manufacturing semiconductor device | Kazuyuki Kakuta, Shigeru Matsui, Yoshisada Ebata, Norio Hasegawa | 2016-07-12 |
| 8586447 | Semiconductor device and manufacturing method of the same | Junji Noguchi, Takashi Matsumoto, Takayuki Oshima | 2013-11-19 |
| 8247902 | Semiconductor device and manufacturing method of the same | Junji Noguchi, Takashi Matsumoto, Takayuki Oshima | 2012-08-21 |
| 7911055 | Semiconductor device and manufacturing method of the same | Junji Noguchi, Takashi Matsumoto, Takayuki Oshima | 2011-03-22 |
| 7501347 | Semiconductor device and manufacturing method of the same | Junji Noguchi, Takashi Matsumoto, Takayuki Oshima | 2009-03-10 |
| 6040110 | Process and apparatus for the removal of resist | Seiichirou Shirai, Takayuki Noishiki, Satoshi Sakai, Katsuhiro Sasajima, Eiji Toyoda +1 more | 2000-03-21 |
| 5725971 | Method of manufacturing phase shift masks and a method of manufacturing semiconductor integrated circuit devices | Noboru Moriuchi, Seiichirou Shirai | 1998-03-10 |