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Diffraction grating, method for manufacturing diffraction grating, and photomask |
Kenta YAEGASHI |
2025-07-15 |
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Manufacturing method of concave diffraction grating, concave diffraction grating, and analyzer using the same |
Kenta YAEGASHI, Takanori Aono |
2022-07-19 |
| 11366255 |
Concave diffraction grating, method for producing the same, and optical device |
Takanori Aono, Kenta YAEGASHI, Shigeru Matsui |
2022-06-21 |
| 9945993 |
Curved grating, method for manufacturing the same, and optical device |
Takanori Aono, Shigeru Matsui, Tetsuya Watanabe |
2018-04-17 |
| 9709714 |
Curved face diffraction grating fabrication method, curved face diffraction grating cast, and curved face diffraction grating employing same |
Takanori Aono, Shigeru Matsui, Tetsuya Watanabe, Yugo Onoda |
2017-07-18 |
| 9390934 |
Phase shift mask, method of forming asymmetric pattern, method of manufacturing diffraction grating, and method of manufacturing semiconductor device |
Kazuyuki Kakuta, Toshihiko Onozuka, Shigeru Matsui, Norio Hasegawa |
2016-07-12 |
| 9104118 |
Exposure device and method for producing structure |
Naoya Nakai |
2015-08-11 |
| 7050164 |
Spectrophotometer |
Kouhei Kabuki, Tadashi Suzuki, Atsushi Hiyama |
2006-05-23 |
| 5822059 |
Atomic absorption spectrophotometer and graphite tube type cuvette used for the same |
Hayato Tobe, Kazuo Moriya, Yasushi Terui |
1998-10-13 |
| 5801827 |
Analysis device using chemical combustion flame |
Kazuo Moriya, Yasushi Terui, Hayato Tobe, Hisashi Kimoto |
1998-09-01 |
| 5786887 |
Atomic absorption spectrophotometer and atomic absorption spectrochemical analysis |
Kazuo Moriya, Hisashi Kimoto, Hayato Tobe, Yasushi Terui |
1998-07-28 |
| 4981357 |
Spectrophotometer having functions of both a double-monochromater and a single-monochromater |
Sadao Minakawa |
1991-01-01 |