Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468322 | Semiconductor device capable of suppressing cracks of through-hole protective film and short circuit of adjacent through-electrodes | Hisanori Yokura, Minoru Murata | 2019-11-05 |
| 9390934 | Phase shift mask, method of forming asymmetric pattern, method of manufacturing diffraction grating, and method of manufacturing semiconductor device | Toshihiko Onozuka, Shigeru Matsui, Yoshisada Ebata, Norio Hasegawa | 2016-07-12 |