Issued Patents All Time
Showing 25 most recent of 85 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11366255 | Concave diffraction grating, method for producing the same, and optical device | Takanori Aono, Yoshisada Ebata, Kenta YAEGASHI | 2022-06-21 |
| 9945993 | Curved grating, method for manufacturing the same, and optical device | Takanori Aono, Yoshisada Ebata, Tetsuya Watanabe | 2018-04-17 |
| 9709714 | Curved face diffraction grating fabrication method, curved face diffraction grating cast, and curved face diffraction grating employing same | Takanori Aono, Yoshisada Ebata, Tetsuya Watanabe, Yugo Onoda | 2017-07-18 |
| 9631924 | Surface profile measurement method and device used therein | Yugo Onoda | 2017-04-25 |
| 9390934 | Phase shift mask, method of forming asymmetric pattern, method of manufacturing diffraction grating, and method of manufacturing semiconductor device | Kazuyuki Kakuta, Toshihiko Onozuka, Yoshisada Ebata, Norio Hasegawa | 2016-07-12 |
| 9157866 | Light source device, surface inspecting apparatus using the device, and method for calibrating surface inspecting apparatus using the device | Mizuki Oku | 2015-10-13 |
| 9046499 | Surface inspecting apparatus and surface inspecting method | — | 2015-06-02 |
| 8934092 | Surface defect inspection method and apparatus | Yoshimasa Oshima, Toshiyuki Nakao | 2015-01-13 |
| 8878119 | Optical inspection method and optical inspection apparatus | — | 2014-11-04 |
| 8823929 | Inspection apparatus | Masaaki Ito, Minori Noguchi | 2014-09-02 |
| RE44977 | Method for detecting particles and defects and inspection equipment thereof | Takahiro Togashi | 2014-07-01 |
| 8743357 | Light source device, surface inspecting apparatus using the device, and method for calibrating surface inspecting apparatus using the device | Mizuki Oku | 2014-06-03 |
| 8699017 | Appearance inspection apparatus | Kenji Oka | 2014-04-15 |
| RE44840 | Method for detecting particles and defects and inspection equipment thereof | Takahiro Togashi | 2014-04-15 |
| 8542354 | Inspection apparatus | Masaaki Ito, Minori Noguchi | 2013-09-24 |
| 8493557 | Surface inspecting apparatus and surface inspecting method | — | 2013-07-23 |
| 8462327 | Appearance inspection apparatus | Kenji Oka | 2013-06-11 |
| 8400629 | Surface defect inspection method and apparatus | Yoshimasa Oshima, Toshiyuki Nakao | 2013-03-19 |
| 8305568 | Surface inspection method and surface inspection apparatus | Masayuki Hachiya | 2012-11-06 |
| 8248594 | Surface inspection method and surface inspection apparatus | — | 2012-08-21 |
| 8246803 | Capillary electrophoresis apparatus and electrophoresis method | Motohiro Yamazaki, Ryoji Inaba, Satoshi Takahashi | 2012-08-21 |
| 8243263 | Optical inspection method and optical inspection apparatus | — | 2012-08-14 |
| 8169606 | Appearance inspection apparatus | Kenji Oka | 2012-05-01 |
| 8160352 | Surface inspection method and surface inspection apparatus | — | 2012-04-17 |
| 8094298 | Method for detecting particles and defects and inspection equipment thereof | Takahiro Togashi | 2012-01-10 |