Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8537351 | Inspection apparatus and inspection method | Masami Ooyama, Kazuhiro Zama, Keiichi Nagasaki | 2013-09-17 |
| 8472016 | Optical defect inspection apparatus | Yuuichiro Iijima, Koichi Asami, Yusuke Miyazaki, Kazuhiro Zama | 2013-06-25 |
| 8310667 | Wafer surface inspection apparatus and wafer surface inspection method | Kazuhiro Zama | 2012-11-13 |
| 8305568 | Surface inspection method and surface inspection apparatus | Shigeru Matsui | 2012-11-06 |
| 8203705 | Inspection apparatus and inspection method | Masami Ooyama, Kazuhiro Zama, Keiichi Nagasaki | 2012-06-19 |
| 8184283 | Optical defect inspection apparatus | Yuuichiro Iijima, Koichi Asami, Yusuke Miyazaki, Kazuhiro Zama | 2012-05-22 |
| 7916287 | Surface inspection method and surface inspection apparatus | Shigeru Matsui | 2011-03-29 |
| 7719669 | Surface inspection method and surface inspection apparatus | Shigeru Matsui | 2010-05-18 |
| 7420668 | Wafer surface inspection apparatus and wafer surface inspection method | Kazuhiro Zama | 2008-09-02 |