Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11159718 | Imaging method | Taisuke Nomiyama | 2021-10-26 |
| 10674073 | Imaging method | Taisuke Nomiyama | 2020-06-02 |
| 8686383 | Object holding apparatus, and inspection apparatus | Koichi Asami, Yusuke Miyazaki | 2014-04-01 |
| 8537351 | Inspection apparatus and inspection method | Masami Ooyama, Masayuki Hachiya, Keiichi Nagasaki | 2013-09-17 |
| 8472016 | Optical defect inspection apparatus | Yuuichiro Iijima, Masayuki Hachiya, Koichi Asami, Yusuke Miyazaki | 2013-06-25 |
| 8310667 | Wafer surface inspection apparatus and wafer surface inspection method | Masayuki Hachiya | 2012-11-13 |
| 8203705 | Inspection apparatus and inspection method | Masami Ooyama, Masayuki Hachiya, Keiichi Nagasaki | 2012-06-19 |
| 8184283 | Optical defect inspection apparatus | Yuuichiro Iijima, Masayuki Hachiya, Koichi Asami, Yusuke Miyazaki | 2012-05-22 |
| 8183549 | Substrate holding apparatus, and inspection or processing apparatus | Koichi Asami, Yusuke Miyazaki | 2012-05-22 |
| 7999242 | Substrate holding apparatus, and inspection or processing apparatus | Koichi Asami, Yusuke Miyazaki | 2011-08-16 |
| 7925390 | Mini environment apparatus, inspection apparatus, manufacturing apparatus and cleaning method of space | Takahiro Jingu, Yusuke Miyazaki | 2011-04-12 |
| 7894052 | Optical defect inspection apparatus | Noriyuki Aizawa, Hiroyuki Kawakami, Kazuo Takahashi, Yusuke Miyazaki, Shingo Tanaka | 2011-02-22 |
| 7746461 | Optical defect inspection apparatus | Noriyuki Aizawa, Hiroyuki Kawakami, Kazuo Takahashi, Yusuke Miyazaki, Shingo Tanaka | 2010-06-29 |
| 7723709 | Substrate holding apparatus, and inspection or processing apparatus | Koichi Asami, Yusuke Miyazaki | 2010-05-25 |
| 7420668 | Wafer surface inspection apparatus and wafer surface inspection method | Masayuki Hachiya | 2008-09-02 |