Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11959735 | Height measuring device and beam irradiation device | Yuichi Shimoda, Makoto Suzuki | 2024-04-16 |
| 10641607 | Height detection apparatus and charged particle beam apparatus | Yoshifumi Sekiguchi, Koichi Taniguchi, Makoto Suzuki | 2020-05-05 |
| 9851548 | Optical microscope device and testing apparatus comprising same | Kei Shimura, Tetsuya Niibori, Mizuki Oku | 2017-12-26 |
| 9104118 | Exposure device and method for producing structure | Yoshisada Ebata | 2015-08-11 |