| 7603194 |
Fabrication system and fabrication method |
Natsuki Yokoyama, Eiichi Murakami, Fumihiko Uchida, Kenichi Mizuishi, Yoshio Kawamura |
2009-10-13 |
| 7392106 |
Fabrication system and fabrication method |
Natsuki Yokoyama, Eiichi Murakami, Fumihiko Uchida, Kenichi Mizuishi, Yoshio Kawamura |
2008-06-24 |
| 7310563 |
Fabrication system and fabrication method |
Natsuki Yokoyama, Eiichi Murakami, Fumihiko Uchida, Kenichi Mizuishi, Yoshio Kawamura |
2007-12-18 |
| 7062344 |
Fabrication system and fabrication method |
Natsuki Yokoyama, Eiichi Murakami, Fumihiko Uchida, Kenichi Mizuishi, Yoshio Kawamura |
2006-06-13 |
| 6878586 |
Semiconductor memory device |
Shinichiro Kimura, Naotaka Hashimoto, Yoshio Sakai, Tokuo Kure, Toru Kaga +1 more |
2005-04-12 |
| 6700152 |
Dynamic random access memory including a logic circuit and an improved storage capacitor arrangement |
Takuya Fukuda, Nobuyoshi Kobayashi, Yoshitaka Nakamura, Masayoshi Saito, Shinichi Fukada |
2004-03-02 |
| RE38296 |
Semiconductor memory device with recessed array region |
Noboru Moriuchi, Yoshiki Yamaguchi, Toshihiko Tanaka, Norio Hasegawa, Shin Kimura +2 more |
2003-11-04 |
| 6479899 |
Semiconductor integrated circuit device and process for manufacturing the same |
Takuya Fukuda, Nobuyoshi Kobayashi, Yoshitaka Nakamura, Masayoshi Saito, Shinichi Fukada |
2002-11-12 |
| 6432769 |
Semiconductor integrated circuit device and process for manufacture the same |
Takuya Fukuda, Nobuyoshi Kobayashi, Yoshitaka Nakamura, Masayoshi Saito, Shinichi Fukada |
2002-08-13 |
| 6355517 |
Method for fabricating semiconductor memory with a groove |
Hideo Sunami, Tokuo Kure |
2002-03-12 |
| 6099598 |
Fabrication system and fabrication method |
Natsuki Yokoyama, Eiichi Murakami, Fumihiko Uchida, Kenichi Mizuishi, Yoshio Kawamura |
2000-08-08 |
| 5981399 |
Method and apparatus for fabricating semiconductor devices |
Yoshio Kawamura, Tatuharu Yamamoto, Shigeo Moriyama, Natsuki Yokoyama, Fumihiko Uchida +2 more |
1999-11-09 |
| 5858863 |
Fabrication system and method having inter-apparatus transporter |
Natsuki Yokoyama, Eiichi Murakami, Fumihiko Uchida, Kenichi Mizuishi, Yoshio Kawamura |
1999-01-12 |
| 5820679 |
Fabrication system and method having inter-apparatus transporter |
Natsuki Yokoyama, Eiichi Murakami, Fumihiko Uchida, Kenichi Mizuishi, Yoshio Kawamura |
1998-10-13 |
| 5601686 |
Wafer transport method |
Yoshio Kawamura, Fumihiko Uchida, Kenichi Mizuishi, Natsuki Yokoyama, Eiichi Murakami +2 more |
1997-02-11 |
| 5591998 |
Semiconductor memory device |
Shinichiro Kimura, Naotaka Hashimoto, Yoshio Sakai, Tokuo Kure, Toru Kaga +1 more |
1997-01-07 |
| 5583358 |
Semiconductor memory device having stacked capacitors |
Shinichiro Kimura, Naotaka Hashimoto, Yoshio Sakai, Tokuo Kure, Toru Kaga +1 more |
1996-12-10 |
| 5562800 |
Wafer transport method |
Yoshio Kawamura, Fumihiko Uchida, Kenichi Mizuishi, Natsuki Yokoyama, Eiichi Murakami +2 more |
1996-10-08 |
| 5426326 |
Semiconductor device including arrangement for reducing junction degradation |
Kiyonori Ohyu, Kozo Watanabe, Osamu Tsuchiya, Kazuyoshi Oshima, Atsushi Hiraiwa +1 more |
1995-06-20 |
| 5374576 |
Method of fabricating stacked capacitor cell memory devices |
Shinichiro Kimura, Naotaka Hashimoto, Yoshio Sakai, Tokuo Kure, Toru Kaga +1 more |
1994-12-20 |
| 5357131 |
Semiconductor memory with trench capacitor |
Hideo Sunami, Tokuo Kure, Masao Tamura, Masanobu Miyao |
1994-10-18 |
| 5237528 |
Semiconductor memory |
Hideo Sunami, Tokuo Kure, Masanobu Miyao, Katsuhiro Shimohigashi, Yoshio Sakai +4 more |
1993-08-17 |
| 5214496 |
Semiconductor memory |
Hideo Sunami, Tokuo Kure, Masanobu Miyao, Katsuhiro Shimohigashi, Yoshio Sakai +4 more |
1993-05-25 |
| 5200635 |
Semiconductor device having a low-resistivity planar wiring structure |
Toru Kaga, Shinichiro Kimura, Katsutaka Kimura, Yoshinobu Nakagome, Digh Hisamoto +4 more |
1993-04-06 |
| 5196910 |
Semiconductor memory device with recessed array region |
Noboru Moriuchi, Yoshiki Yamaguchi, Toshihiko Tanaka, Norio Hasegawa, Shin Kimura +2 more |
1993-03-23 |