Issued Patents All Time
Showing 25 most recent of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9194826 | Electron beam apparatus and sample observation method using the same | Kenji Terao, Masahiro Hatakeyama, Kenji Watanabe, Yoshihiko Naito, Takeshi Murakami +1 more | 2015-11-24 |
| 7385197 | Electron beam apparatus and a device manufacturing method using the same apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Takeshi Murakami, Hirosi Sobukawa +1 more | 2008-06-10 |
| 6894334 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 2005-05-17 |
| 6878586 | Semiconductor memory device | Shinichiro Kimura, Naotaka Hashimoto, Yoshio Sakai, Tokuo Kure, Yoshifumi Kawamoto +1 more | 2005-04-12 |
| RE38296 | Semiconductor memory device with recessed array region | Noboru Moriuchi, Yoshiki Yamaguchi, Toshihiko Tanaka, Norio Hasegawa, Yoshifumi Kawamoto +2 more | 2003-11-04 |
| 6548847 | SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE HAVING A FIRST WIRING STRIP EXPOSED THROUGH A CONNECTING HOLE, A TRANSITION-METAL FILM IN THE CONNECTING HOLE AND AN ALUMINUM WIRING STRIP THEREOVER, AND A TRANSITION-METAL NITRIDE FILM BETWEEN THE ALUMINUM WIRING STRIP AND THE TRANSITION-METAL FILM | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 2003-04-15 |
| 6342412 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 2002-01-29 |
| 6169324 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 2001-01-02 |
| 6127255 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 2000-10-03 |
| 5811316 | Method of forming teos oxide and silicon nitride passivation layer on aluminum wiring | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 1998-09-22 |
| 5780882 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 1998-07-14 |
| 5739589 | Semiconductor integrated circuit device process for fabricating the same and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 1998-04-14 |
| 5700705 | Semiconductor integrated circuit device | Satoshi Meguro, Kiyofumi Uchibori, Norio Suzuki, Makoto Motoyoshi, Atsuyoshi Koike +6 more | 1997-12-23 |
| 5646423 | Semiconductor integrated circuit device | Satoshi Meguro, Kiyofumi Uchibori, Norio Suzuki, Makoto Motoyoshi, Atsuyoshi Koike +6 more | 1997-07-08 |
| 5619055 | Semiconductor integrated circuit device | Satoshi Meguro, Kiyofumi Uchibori, Norio Suzuki, Makoto Motoyoshi, Atsuyoshi Koike +6 more | 1997-04-08 |
| 5591998 | Semiconductor memory device | Shinichiro Kimura, Naotaka Hashimoto, Yoshio Sakai, Tokuo Kure, Yoshifumi Kawamoto +1 more | 1997-01-07 |
| 5583358 | Semiconductor memory device having stacked capacitors | Shinichiro Kimura, Naotaka Hashimoto, Yoshio Sakai, Tokuo Kure, Yoshifumi Kawamoto +1 more | 1996-12-10 |
| 5557147 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 1996-09-17 |
| 5523965 | Semiconductor memory device and method of manufacturing same | Shoji Shukuri, Masahiro Moniwa, Dai Hisamoto | 1996-06-04 |
| 5483083 | Semiconductor integrated circuit device | Satoshi Meguro, Kiyofumi Uchibori, Norio Suzuki, Makoto Motoyoshi, Atsuyoshi Koike +6 more | 1996-01-09 |
| 5466621 | Method of manufacturing a semiconductor device having silicon islands | Dai Hisamoto, Shinichiro Kimura, Masahiro Moniwa, Haruhiko Tanaka, Atsushi Hiraiwa +1 more | 1995-11-14 |
| 5374576 | Method of fabricating stacked capacitor cell memory devices | Shinichiro Kimura, Naotaka Hashimoto, Yoshio Sakai, Tokuo Kure, Yoshifumi Kawamoto +1 more | 1994-12-20 |
| 5349218 | Semiconductor integrated circuit device including memory cells having a structure effective in suppression of leak current | Yoshitaka Tadaki, Toshihiro Sekiguchi, Hiroyuki Uchiyama, Jun Murata, Osaomi Enomoto | 1994-09-20 |
| 5346834 | Method for manufacturing a semiconductor device and a semiconductor memory device | Dai Hisamoto, Shinichiro Kimura, Masahiro Moniwa, Haruhiko Tanaka, Atsushi Hiraiwa +1 more | 1994-09-13 |
| 5331191 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 1994-07-19 |