Issued Patents All Time
Showing 25 most recent of 93 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9406480 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama, Shoji Yoshikawa +7 more | 2016-08-02 |
| 9390886 | Electro-optical inspection apparatus using electron beam | Mamoru Nakasuji, Tohru Satake, Hirosi Sobukawa | 2016-07-12 |
| 9368314 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba, Hirosi Sobukawa +9 more | 2016-06-14 |
| 8946631 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama, Shoji Yoshikawa +7 more | 2015-02-03 |
| 8859984 | Method and apparatus for inspecting sample surface | Yoshihiko Naito, Hirosi Sobukawa, Kenji Terao, Masahiro Hatakeyama, Katsuya Okumura | 2014-10-14 |
| 8822919 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Takeshi Murakami +6 more | 2014-09-02 |
| 8803103 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba, Hirosi Sobukawa +9 more | 2014-08-12 |
| 8796621 | Detector and inspecting apparatus | Masahiro Hatakeyama, Shoji Yoshikawa, Kenichi Suematsu, Tsutomu Karimata | 2014-08-05 |
| 8742341 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama, Shoji Yoshikawa +7 more | 2014-06-03 |
| 8674317 | Sample surface inspection apparatus and method | Masahiro Hatakeyama, Kenji Watanabe, Takeshi Murakami, Tohru Satake | 2014-03-18 |
| 8525127 | Method and apparatus for inspecting sample surface | Yoshihiko Naito, Hirosi Sobukawa, Kenji Terao, Masahiro Hatakeyama, Katsuya Okumura | 2013-09-03 |
| 8431892 | Detector and inspecting apparatus | Masahiro Hatakeyama, Shoji Yoshikawa, Kenichi Suematsu, Tsutomu Karimata | 2013-04-30 |
| 8368031 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba, Hirosi Sobukawa +9 more | 2013-02-05 |
| 8368016 | Electron beam apparatus and a device manufacturing method by using said electron beam apparatus | Mamoru Nakasuji, Takao Kato, Tohru Satake, Takeshi Murakami, Kenji Watanabe | 2013-02-05 |
| 8076654 | Sample surface inspection apparatus and method | Masahiro Hatakeyama, Kenji Watanabe, Takeshi Murakami, Tohru Satake | 2011-12-13 |
| 8053726 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba, Hirosi Sobukawa +9 more | 2011-11-08 |
| 8013315 | Charged particle beam apparatus, method of adjusting astigmatism using same and method of manufacturing device using same | Kenji Watanabe, Takeshi Murakami, Ryo Tajima, Masahiro Hatakeyama, Masatoshi Tsuneoka | 2011-09-06 |
| 7952071 | Apparatus and method for inspecting sample surface | Yoshihiko Naito, Hirosi Sobukawa, Masahiro Hatakeyama, Kenji Terao, Takeshi Murakami +2 more | 2011-05-31 |
| 7928378 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Takeshi Murakami +6 more | 2011-04-19 |
| 7928382 | Detector and inspecting apparatus | Masahiro Hatakeyama, Shoji Yoshikawa, Kenichi Suematsu, Tsutomu Karimata | 2011-04-19 |
| 7863580 | Electron beam apparatus and an aberration correction optical apparatus | Masahiro Hatakeyama, Takeshi Murakami, Mamoru Nakasuji, Hirosi Sobukawa, Satoshi Mori +3 more | 2011-01-04 |
| 7829871 | Sheet beam-type testing apparatus | Mamoru Nakasuji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa, Tsutomu Karimata +3 more | 2010-11-09 |
| 7745784 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Tohru Satake, Kenji Watanabe, Takeshi Murakami, Hirosi Sobukawa +9 more | 2010-06-29 |
| 7741601 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama, Shoji Yoshikawa +7 more | 2010-06-22 |
| 7601972 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa, Shoji Yoshikawa +5 more | 2009-10-13 |