Issued Patents All Time
Showing 25 most recent of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11545335 | Vacuum connection mechanism and electron optical device | Takashi Ohara | 2023-01-03 |
| 11515118 | Electron beam irradiation apparatus and electron beam alignment method | Kenji Watanabe, Shinichi Okada, Ryo Tajima | 2022-11-29 |
| 11217421 | Adjustment method and electron beam device | Takehide Hayashi, Ryo Tajima, Tatsuya Kohama, Kenji Watanabe | 2022-01-04 |
| 11164697 | Coil-integrated-type yoke and manufacturing method of the same | Keisuke MATSUSHIMA | 2021-11-02 |
| 10900573 | Gate valve | — | 2021-01-26 |
| 10157722 | Inspection device | Masahiro Hatakeyama, Shoji Yoshikawa, Takeshi Murakami, Kenji Watanabe, Yoshihiko Naito +5 more | 2018-12-18 |
| 9601302 | Inspection apparatus | Shoji Yoshikawa, Kiwamu Tsukamoto, Takeshi Murakami, Masahiro Hatakeyama | 2017-03-21 |
| 9406480 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama +7 more | 2016-08-02 |
| 9368314 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba +9 more | 2016-06-14 |
| 9134261 | Inspection apparatus | Shoji Yoshikawa, Kiwamu Tsukamoto, Takeshi Murakami, Masahiro Hatakeyama | 2015-09-15 |
| 8946631 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama +7 more | 2015-02-03 |
| 8884225 | Sample observing device and sample observing method | Tatsuya Kohama, Shoji Yoshikawa, Masahiro Hatakeyama | 2014-11-11 |
| 8822919 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Kenji Watanabe, Nobuharu Noji, Takeshi Murakami +6 more | 2014-09-02 |
| 8803103 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba +9 more | 2014-08-12 |
| 8796621 | Detector and inspecting apparatus | Masahiro Hatakeyama, Shoji Yoshikawa, Kenichi Suematsu, Nobuharu Noji | 2014-08-05 |
| 8742341 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama +7 more | 2014-06-03 |
| 8497476 | Inspection device | Masahiro Hatakeyama, Shoji Yoshikawa, Takeshi Murakami, Kenji Watanabe, Yoshihiko Naito +5 more | 2013-07-30 |
| 8431892 | Detector and inspecting apparatus | Masahiro Hatakeyama, Shoji Yoshikawa, Kenichi Suematsu, Nobuharu Noji | 2013-04-30 |
| 8368031 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba +9 more | 2013-02-05 |
| 8053726 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba +9 more | 2011-11-08 |
| 7928382 | Detector and inspecting apparatus | Masahiro Hatakeyama, Shoji Yoshikawa, Kenichi Suematsu, Nobuharu Noji | 2011-04-19 |
| 7928378 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Kenji Watanabe, Nobuharu Noji, Takeshi Murakami +6 more | 2011-04-19 |
| 7888642 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Nabuharu Noji, Tohru Satake, Masahiro Hatakeyama, Kenji Watanabe +7 more | 2011-02-15 |
| 7863580 | Electron beam apparatus and an aberration correction optical apparatus | Masahiro Hatakeyama, Takeshi Murakami, Nobuharu Noji, Mamoru Nakasuji, Hirosi Sobukawa +3 more | 2011-01-04 |
| 7829871 | Sheet beam-type testing apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa +3 more | 2010-11-09 |