| 9390886 |
Electro-optical inspection apparatus using electron beam |
Nobuharu Noji, Tohru Satake, Hirosi Sobukawa |
2016-07-12 |
| 9368314 |
Inspection system by charged particle beam and method of manufacturing devices using the system |
Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba, Hirosi Sobukawa +9 more |
2016-06-14 |
| 8822919 |
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former |
Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji +6 more |
2014-09-02 |
| 8809799 |
Charged particles beam apparatus and charged particles beam apparatus design method |
— |
2014-08-19 |
| 8803103 |
Inspection system by charged particle beam and method of manufacturing devices using the system |
Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba, Hirosi Sobukawa +9 more |
2014-08-12 |
| 8368031 |
Inspection system by charged particle beam and method of manufacturing devices using the system |
Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba, Hirosi Sobukawa +9 more |
2013-02-05 |
| 8368016 |
Electron beam apparatus and a device manufacturing method by using said electron beam apparatus |
Takao Kato, Nobuharu Noji, Tohru Satake, Takeshi Murakami, Kenji Watanabe |
2013-02-05 |
| 8067732 |
Electron beam apparatus |
Takeshi Murakami, Tohru Satake, Tsutomi Karimata, Toshifumi Kimba, Matsutaro Miyamoto +4 more |
2011-11-29 |
| 8053726 |
Inspection system by charged particle beam and method of manufacturing devices using the system |
Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba, Hirosi Sobukawa +9 more |
2011-11-08 |
| 7928378 |
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former |
Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji +6 more |
2011-04-19 |
| 7888642 |
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus |
Nabuharu Noji, Tohru Satake, Masahiro Hatakeyama, Kenji Watanabe, Takao Kato +7 more |
2011-02-15 |
| 7863580 |
Electron beam apparatus and an aberration correction optical apparatus |
Masahiro Hatakeyama, Takeshi Murakami, Nobuharu Noji, Hirosi Sobukawa, Satoshi Mori +3 more |
2011-01-04 |
| 7829871 |
Sheet beam-type testing apparatus |
Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa, Tsutomu Karimata +3 more |
2010-11-09 |
| 7745784 |
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus |
Tohru Satake, Kenji Watanabe, Takeshi Murakami, Nobuharu Noji, Hirosi Sobukawa +9 more |
2010-06-29 |
| 7601972 |
Inspection system by charged particle beam and method of manufacturing devices using the system |
Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa, Shoji Yoshikawa +5 more |
2009-10-13 |
| 7598471 |
Method of electric discharge machining a cathode for an electron gun |
Muneki Hamashima, Takao Kato, Nobuharu Noji, Tohru Satake |
2009-10-06 |
| 7569838 |
Electron beam inspection system and inspection method and method of manufacturing devices using the system |
Kenji Watanabe, Hirosi Sobukawa, Nobuharu Noji, Tohru Satake, Shoji Yoshikawa +7 more |
2009-08-04 |
| 7479634 |
Electron beam apparatus and device manufacturing method using the same |
Takao Kato, Kenji Watanabe, Shoji Yoshikawa, Tohru Satake, Nobuharu Noji |
2009-01-20 |
| 7439502 |
Electron beam apparatus and device production method using the electron beam apparatus |
Tohru Satake, Nobuharu Noji, Hirosi Sobukawa, Tsutomu Karimata, Shoji Yoshikawa +6 more |
2008-10-21 |
| 7425703 |
Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation method |
Tohru Satake, Nobuharu Noji, Takeshi Murakami, Kenji Watanabe, Toshifumi Kimba +1 more |
2008-09-16 |
| 7423267 |
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus |
Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Kenji Watanabe, Takao Kato +7 more |
2008-09-09 |
| 7420164 |
Objective lens, electron beam system and method of inspecting defect |
Tohru Satake, Hirosi Sobukawa, Takeshi Murakami, Kenji Watanabe, Nobuharu Noji |
2008-09-02 |
| 7417236 |
Sheet beam-type testing apparatus |
Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa, Tsutomu Karimata +3 more |
2008-08-26 |
| 7411191 |
Inspection system by charged particle beam and method of manufacturing devices using the system |
Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba, Hiroshi Sobukawa +9 more |
2008-08-12 |
| 7408643 |
Method and apparatus for inspecting samples, and method for manufacturing devices using method and apparatus for inspecting samples |
Toshifumi Kimba, Tohru Satake |
2008-08-05 |
