Issued Patents All Time
Showing 25 most recent of 133 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9390886 | Electro-optical inspection apparatus using electron beam | Nobuharu Noji, Tohru Satake, Hirosi Sobukawa | 2016-07-12 |
| 9368314 | Inspection system by charged particle beam and method of manufacturing devices using the system | Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba, Hirosi Sobukawa +9 more | 2016-06-14 |
| 8822919 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji +6 more | 2014-09-02 |
| 8809799 | Charged particles beam apparatus and charged particles beam apparatus design method | — | 2014-08-19 |
| 8803103 | Inspection system by charged particle beam and method of manufacturing devices using the system | Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba, Hirosi Sobukawa +9 more | 2014-08-12 |
| 8368031 | Inspection system by charged particle beam and method of manufacturing devices using the system | Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba, Hirosi Sobukawa +9 more | 2013-02-05 |
| 8368016 | Electron beam apparatus and a device manufacturing method by using said electron beam apparatus | Takao Kato, Nobuharu Noji, Tohru Satake, Takeshi Murakami, Kenji Watanabe | 2013-02-05 |
| 8067732 | Electron beam apparatus | Takeshi Murakami, Tohru Satake, Tsutomi Karimata, Toshifumi Kimba, Matsutaro Miyamoto +4 more | 2011-11-29 |
| 8053726 | Inspection system by charged particle beam and method of manufacturing devices using the system | Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba, Hirosi Sobukawa +9 more | 2011-11-08 |
| 7928378 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji +6 more | 2011-04-19 |
| 7888642 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Nabuharu Noji, Tohru Satake, Masahiro Hatakeyama, Kenji Watanabe, Takao Kato +7 more | 2011-02-15 |
| 7863580 | Electron beam apparatus and an aberration correction optical apparatus | Masahiro Hatakeyama, Takeshi Murakami, Nobuharu Noji, Hirosi Sobukawa, Satoshi Mori +3 more | 2011-01-04 |
| 7829871 | Sheet beam-type testing apparatus | Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa, Tsutomu Karimata +3 more | 2010-11-09 |
| 7745784 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Tohru Satake, Kenji Watanabe, Takeshi Murakami, Nobuharu Noji, Hirosi Sobukawa +9 more | 2010-06-29 |
| 7601972 | Inspection system by charged particle beam and method of manufacturing devices using the system | Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa, Shoji Yoshikawa +5 more | 2009-10-13 |
| 7598471 | Method of electric discharge machining a cathode for an electron gun | Muneki Hamashima, Takao Kato, Nobuharu Noji, Tohru Satake | 2009-10-06 |
| 7569838 | Electron beam inspection system and inspection method and method of manufacturing devices using the system | Kenji Watanabe, Hirosi Sobukawa, Nobuharu Noji, Tohru Satake, Shoji Yoshikawa +7 more | 2009-08-04 |
| 7479634 | Electron beam apparatus and device manufacturing method using the same | Takao Kato, Kenji Watanabe, Shoji Yoshikawa, Tohru Satake, Nobuharu Noji | 2009-01-20 |
| 7439502 | Electron beam apparatus and device production method using the electron beam apparatus | Tohru Satake, Nobuharu Noji, Hirosi Sobukawa, Tsutomu Karimata, Shoji Yoshikawa +6 more | 2008-10-21 |
| 7425703 | Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation method | Tohru Satake, Nobuharu Noji, Takeshi Murakami, Kenji Watanabe, Toshifumi Kimba +1 more | 2008-09-16 |
| 7423267 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Kenji Watanabe, Takao Kato +7 more | 2008-09-09 |
| 7420164 | Objective lens, electron beam system and method of inspecting defect | Tohru Satake, Hirosi Sobukawa, Takeshi Murakami, Kenji Watanabe, Nobuharu Noji | 2008-09-02 |
| 7417236 | Sheet beam-type testing apparatus | Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa, Tsutomu Karimata +3 more | 2008-08-26 |
| 7411191 | Inspection system by charged particle beam and method of manufacturing devices using the system | Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba, Hiroshi Sobukawa +9 more | 2008-08-12 |
| 7408643 | Method and apparatus for inspecting samples, and method for manufacturing devices using method and apparatus for inspecting samples | Toshifumi Kimba, Tohru Satake | 2008-08-05 |