Issued Patents All Time
Showing 26–50 of 133 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7408175 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji +6 more | 2008-08-05 |
| 7385197 | Electron beam apparatus and a device manufacturing method using the same apparatus | Nobuharu Noji, Tohru Satake, Takeshi Murakami, Hirosi Sobukawa, Toru Kaga +1 more | 2008-06-10 |
| 7361895 | Electron beam apparatus and a device manufacturing method by using said electron beam apparatus | Takao Kato, Nobuharu Noji, Tohru Satake, Takeshi Murakami, Kenji Watanabe | 2008-04-22 |
| 7351969 | Electron beam inspection system and inspection method and method of manufacturing devices using the system | Kenji Watanabe, Hirosi Sobukawa, Nobuharu Noji, Tohru Satake, Shoji Yoshikawa +7 more | 2008-04-01 |
| 7312449 | Electron beam system and method of manufacturing devices using the system | Takao Kato, Tohru Satake, Kenji Watanabe, Takeshi Murakami, Nobuharu Noji | 2007-12-25 |
| 7297949 | Inspection system by charged particle beam and method of manufacturing devices using the system | Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa, Shoji Yoshikawa +5 more | 2007-11-20 |
| 7256405 | Sample repairing apparatus, a sample repairing method and a device manufacturing method using the same method | Takao Kato, Tohru Satake, Kenji Terao, Takeshi Murakami, Nobuharu Noji | 2007-08-14 |
| 7247848 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Tohru Satake, Kenji Watanabe, Takeshi Murakami, Nobuharu Noji, Hirosi Sobukawa +9 more | 2007-07-24 |
| 7248353 | Method and apparatus for inspecting samples, and method for manufacturing devices using method and apparatus for inspecting samples | Toshifumi Kimba, Tohru Satake | 2007-07-24 |
| 7244933 | Electron beam apparatus, a pattern evaluation method and a device manufacturing method using the electron beam apparatus or pattern evaluation method | Takao Kato, Toshifumi Kimba, Tohru Satake | 2007-07-17 |
| 7244932 | Electron beam apparatus and device fabrication method using the electron beam apparatus | Tohru Satake, Nobuharu Noji, Hirosi Sobukawa, Tsutomu Karimata, Shoji Yoshikawa +6 more | 2007-07-17 |
| 7241993 | Inspection system by charged particle beam and method of manufacturing devices using the system | Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba, Hirosi Sobukawa +9 more | 2007-07-10 |
| 7235799 | System and method for evaluation using electron beam and manufacture of devices | Tohru Satake, Takao Kato, Nobuharu Noji | 2007-06-26 |
| 7227141 | Electron beam apparatus | Takao Kato, Tohru Satake, Nobuharu Noji | 2007-06-05 |
| 7223973 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji +6 more | 2007-05-29 |
| 7205540 | Electron beam apparatus and device manufacturing method using same | Takao Kato, Kenji Watanabe, Shoji Yoshikawa, Tohru Satake, Nobuharu Noji | 2007-04-17 |
| 7205559 | Electron beam apparatus and device manufacturing method using same | Muneki Hamashima, Takao Kato, Nobuharu Noji, Tohru Satake | 2007-04-17 |
| 7176459 | Electron beam apparatus | Kenji Watanabe, Tohru Satake, Takeshi Murakami, Tsutomu Karimata, Nobuharu Noji +2 more | 2007-02-13 |
| 7157703 | Electron beam system | Tohru Satake, Nobuharu Noji, Shoji Yoshikawa, Takeshi Murakami | 2007-01-02 |
| 7135676 | Inspection system by charged particle beam and method of manufacturing devices using the system | Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa, Shoji Yoshikawa +5 more | 2006-11-14 |
| 7129485 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Kenji Watanabe, Takao Kato +7 more | 2006-10-31 |
| 7109483 | Method for inspecting substrate, substrate inspecting system and electron beam apparatus | Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Masahiro Hatakeyama, Kenji Watanabe +6 more | 2006-09-19 |
| 7109484 | Sheet beam-type inspection apparatus | Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa, Tsutomu Karimata +3 more | 2006-09-19 |
| 7095022 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Kenji Watanabe, Takao Kato +7 more | 2006-08-22 |
| 7049585 | Sheet beam-type testing apparatus | Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa, Tsutomu Karimata +3 more | 2006-05-23 |