Issued Patents All Time
Showing 1–25 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9406480 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Masahiro Hatakeyama, Shoji Yoshikawa +7 more | 2016-08-02 |
| 9390886 | Electro-optical inspection apparatus using electron beam | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake | 2016-07-12 |
| 9368314 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba +9 more | 2016-06-14 |
| 8946631 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Masahiro Hatakeyama, Shoji Yoshikawa +7 more | 2015-02-03 |
| 8859984 | Method and apparatus for inspecting sample surface | Nobuharu Noji, Yoshihiko Naito, Kenji Terao, Masahiro Hatakeyama, Katsuya Okumura | 2014-10-14 |
| 8822919 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji +6 more | 2014-09-02 |
| 8803103 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba +9 more | 2014-08-12 |
| 8742341 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Masahiro Hatakeyama, Shoji Yoshikawa +7 more | 2014-06-03 |
| 8525127 | Method and apparatus for inspecting sample surface | Nobuharu Noji, Yoshihiko Naito, Kenji Terao, Masahiro Hatakeyama, Katsuya Okumura | 2013-09-03 |
| 8368031 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba +9 more | 2013-02-05 |
| 8053726 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba +9 more | 2011-11-08 |
| 7952071 | Apparatus and method for inspecting sample surface | Nobuharu Noji, Yoshihiko Naito, Masahiro Hatakeyama, Kenji Terao, Takeshi Murakami +2 more | 2011-05-31 |
| 7928378 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji +6 more | 2011-04-19 |
| 7888642 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Nabuharu Noji, Tohru Satake, Masahiro Hatakeyama, Kenji Watanabe +7 more | 2011-02-15 |
| 7863580 | Electron beam apparatus and an aberration correction optical apparatus | Masahiro Hatakeyama, Takeshi Murakami, Nobuharu Noji, Mamoru Nakasuji, Satoshi Mori +3 more | 2011-01-04 |
| 7829871 | Sheet beam-type testing apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Tsutomu Karimata +3 more | 2010-11-09 |
| 7745784 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Tohru Satake, Kenji Watanabe, Takeshi Murakami, Nobuharu Noji +9 more | 2010-06-29 |
| 7741601 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Masahiro Hatakeyama, Shoji Yoshikawa +7 more | 2010-06-22 |
| 7601972 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Shoji Yoshikawa +5 more | 2009-10-13 |
| 7569838 | Electron beam inspection system and inspection method and method of manufacturing devices using the system | Kenji Watanabe, Nobuharu Noji, Tohru Satake, Shoji Yoshikawa, Tsutomu Karimata +7 more | 2009-08-04 |
| 7439502 | Electron beam apparatus and device production method using the electron beam apparatus | Mamoru Nakasuji, Tohru Satake, Nobuharu Noji, Tsutomu Karimata, Shoji Yoshikawa +6 more | 2008-10-21 |
| 7423267 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Kenji Watanabe +7 more | 2008-09-09 |
| 7420164 | Objective lens, electron beam system and method of inspecting defect | Mamoru Nakasuji, Tohru Satake, Takeshi Murakami, Kenji Watanabe, Nobuharu Noji | 2008-09-02 |
| 7417236 | Sheet beam-type testing apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Tsutomu Karimata +3 more | 2008-08-26 |
| 7408175 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji +6 more | 2008-08-05 |