Issued Patents All Time
Showing 26–45 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7385197 | Electron beam apparatus and a device manufacturing method using the same apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Takeshi Murakami, Toru Kaga +1 more | 2008-06-10 |
| 7365324 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Masahiro Hatakeyama, Shoji Yoshikawa +7 more | 2008-04-29 |
| 7351969 | Electron beam inspection system and inspection method and method of manufacturing devices using the system | Kenji Watanabe, Nobuharu Noji, Tohru Satake, Shoji Yoshikawa, Tsutomu Karimata +7 more | 2008-04-01 |
| 7297949 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Shoji Yoshikawa +5 more | 2007-11-20 |
| 7247848 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Tohru Satake, Kenji Watanabe, Takeshi Murakami, Nobuharu Noji +9 more | 2007-07-24 |
| 7244932 | Electron beam apparatus and device fabrication method using the electron beam apparatus | Mamoru Nakasuji, Tohru Satake, Nobuharu Noji, Tsutomu Karimata, Shoji Yoshikawa +6 more | 2007-07-17 |
| 7241993 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba +9 more | 2007-07-10 |
| 7223973 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji +6 more | 2007-05-29 |
| 7138629 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Masahiro Hatakeyama, Shoji Yoshikawa +7 more | 2006-11-21 |
| 7135676 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Shoji Yoshikawa +5 more | 2006-11-14 |
| 7129485 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Kenji Watanabe +7 more | 2006-10-31 |
| 7109483 | Method for inspecting substrate, substrate inspecting system and electron beam apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Masahiro Hatakeyama +6 more | 2006-09-19 |
| 7109484 | Sheet beam-type inspection apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Tsutomu Karimata +3 more | 2006-09-19 |
| 7095022 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Kenji Watanabe +7 more | 2006-08-22 |
| 7049585 | Sheet beam-type testing apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Tsutomu Karimata +3 more | 2006-05-23 |
| 7025005 | Stage device and angle detecting device | Hiroyuki Shinozaki, Shoji Yoshikawa | 2006-04-11 |
| 6992290 | Electron beam inspection system and inspection method and method of manufacturing devices using the system | Kenji Watanabe, Nobuharu Noji, Tohru Satake, Shoji Yoshikawa, Tsutomu Karimata +7 more | 2006-01-31 |
| 6855929 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji +6 more | 2005-02-15 |
| 6593152 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Tohru Satake, Kenji Watanabe, Takeshi Murakami, Nobuharu Noji +9 more | 2003-07-15 |
| 6217278 | Turbomolecular pump | Atsushi Shiokawa, Matsutaro Miyamoto | 2001-04-17 |