Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11396876 | Control device, control system, control method, recording medium and machine learning device | Keiji Maishigi, Tetsuro Sugiura | 2022-07-26 |
| 10978315 | Vacuum evacuation system | Tetsuro Sugiura, Shinichi Sekiguchi, Takashi Kyotani, Tetsuo Komai, Norio Kimura +2 more | 2021-04-13 |
| 6589009 | Turbo-molecular pump | Matsutaro Miyamoto, Hiroyuki Kawasaki, Hiroshi Sobukawa, Hiroaki Ogamino | 2003-07-08 |
| 6307294 | Magnetic suspending device controlled by temperature of controlled object | Atsusi Ooyama, Hiroyuki Chino, Toshiharu Nakazawa | 2001-10-23 |
| 6220831 | Turbomolecular pump | Matsutaro Miyamoto, Hiroshi Sobukawa, Toshiharu Nakazawa | 2001-04-24 |
| 6217278 | Turbomolecular pump | Matsutaro Miyamoto, Hirosi Sobukawa | 2001-04-17 |
| 6062810 | Turbomolecular pump | Matsutaro Miyamoto, Hiroshi Sobukawa, Toshiharu Nakazawa, Junichi Arami | 2000-05-16 |