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Detoxifying device, method of replacing piping section of detoxifying device, and method of cleaning piping of detoxifying device |
Takanori Inada, Tetsuro Sugiura |
2021-12-14 |
| 10978315 |
Vacuum evacuation system |
Atsushi Shiokawa, Tetsuro Sugiura, Shinichi Sekiguchi, Takashi Kyotani, Norio Kimura +2 more |
2021-04-13 |
| 10920981 |
Burner head for exhaust gas processing apparatus, manufacturing method of the same, combustion chamber for exhaust gas processing apparatus, and manufacturing method and maintenance method of the same |
Kazutomo Miyazaki, Seiji Kashiwagi, Kazumasa HOSOTANI, Takeshi Eda |
2021-02-16 |
| 10641256 |
Vacuum pump with abatement function |
Hiroki Furuta, Koichi Iwasaki, Keiichi Ishikawa, Shinichi Sekiguchi |
2020-05-05 |
| 10641272 |
Vacuum pump with abatement function |
Koichi Iwasaki, Hiroki Furuta, Keiichi Ishikawa, Shinichi Sekiguchi |
2020-05-05 |
| 10557631 |
Exhaust gas treatment apparatus |
Kazutomo Miyazaki, Seiji Kashiwagi |
2020-02-11 |
| 10215407 |
Exhaust gas treatment apparatus |
Kazutomo Miyazaki, Toyoji Shinohara, Seiji Kashiwagi |
2019-02-26 |
| 10040026 |
Fan scrubber and vacuum pump apparatus |
Hiroki Furuta, Tetsuro Sugiura, Atsushi Oyama, Takashi Kyotani, Shinichi Sekiguchi +1 more |
2018-08-07 |
| 7635501 |
Exhaust pipe having means for preventing deposition of a reaction by-product and method for preventing deposition of a reaction by-product |
Norihiko Nomura |
2009-12-22 |
| 7607914 |
Combustion type waste gas treatment system |
Kohtaro Kawamura, Takeshi Tsuji, Rikiya Nakamura, Kazutaka Okuda, Keiichi Ishikawa +5 more |
2009-10-27 |
| 7112060 |
Burner for treating waste gas |
Yoshiro Takemura, Kotaro Kawamura, Takeshi Tsuji, Kazutaka Okuda, Rikiya Nakamura +6 more |
2006-09-26 |
| 6948929 |
Combustion type waste gas treatment system |
Kohtaro Kawamura, Takeshi Tsuji, Rikiya Nakamura, Kazutaka Okuda, Keiichi Ishikawa +5 more |
2005-09-27 |
| 6736635 |
Combustor for exhaust gas treatment |
Yoshiro Takemura, Kotaro Kawamura, Takeshi Tsuji, Kazutaka Okuda, Rikiya Nakamura +6 more |
2004-05-18 |
| 6374635 |
PFC gas recovery process and apparatus |
Junichi Hayakawa, Yoichi Mori |
2002-04-23 |
| 5894131 |
Exhaust apparatus in ion implantation system |
Akira Fukunaga |
1999-04-13 |
| 5582017 |
Cryopump |
Nobuharu Noji, Junichi Hayakawa, Motoyasu Sato, Hiroshi Aono |
1996-12-10 |