Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12358028 | Cleaning apparatus for cleaning member, cleaning method for cleaning member, and substrate cleaning method | Megumi Uno, Chikako TAKATOH, Yumiko Nakamura | 2025-07-15 |
| 12251738 | Method and apparatus for cleaning washing tool, substrate washing device, and method for manufacturing washing tool | Megumi Uno, Chikako TAKATOH, Yumiko Nakamura | 2025-03-18 |
| 11953315 | Vehicle wheel assembly position measurement method and apparatus thereof | Taiga Inoue, Yoko Doi | 2024-04-09 |
| 8784636 | Plating apparatus and plating method | Mizuki Nagai, Nobutoshi Saito, Fumio Kuriyama | 2014-07-22 |
| 8211242 | Substrate processing method, substrate processing apparatus, and control program | Yuki Inoue, Takahiro Ogawa | 2012-07-03 |
| 7498261 | Method and apparatus for forming metal film | Xinming Wang, Daisuke Takagi, Akihiko Tashiro, Yukio Fukunaga, Akira Owatari | 2009-03-03 |
| 7407821 | Substrate processing method | Xinming Wang, Daisuke Takagi, Akihiko Tashiro | 2008-08-05 |
| 7374584 | Interconnects forming method and interconnects forming apparatus | Xinming Wang, Daisuke Takagi, Akihiko Tashiro, Yukio Fukunaga | 2008-05-20 |
| 7285492 | Method for processing substrate | Xinming Wang, Daisuke Takagi, Akihiko Tashiro, Yukio Fukunaga, Akira Owatari +2 more | 2007-10-23 |
| 7262849 | Method of polishing thin film formed on substrate | Shohei Shima | 2007-08-28 |
| 7217653 | Interconnects forming method and interconnects forming apparatus | Xinming Wang, Daisuke Takagi, Akihiko Tashiro, Yukio Fukunaga | 2007-05-15 |
| 7179503 | Method of forming thin metal films on substrates | Hiroshi Nagasawa, Takao Kato | 2007-02-20 |
| 7055535 | Holding unit, processing apparatus and holding method of substrates | Junji Kunisawa, Norio Kimura, Kenya Ito, Yuuki Inoue, Hiroshi Tomita +2 more | 2006-06-06 |
| 6972256 | Method and apparatus for forming thin film of metal | Kuniaki Horie, Naoaki Ogure, Takao Kato, Hiroshi Nagasawa, Shinji Kajita +1 more | 2005-12-06 |
| 6897021 | Reactive probe chip, composite substrate and method for fabrication of the same | Hiroshi Nagasawa, Masayoshi Hirose | 2005-05-24 |
| 6875335 | Electrolytic machining method and apparatus | Yuzo Mori, Mitsuhiko Shirakashi, Takayuki Saito, Yasushi Toma, Itsuki Kobata | 2005-04-05 |
| 6871773 | Composite metallic ultrafine particles and process for producing the same | Hiroshi Nagasawa, Kaori Kagoshima, Makiko Emoto | 2005-03-29 |
| 6780245 | Method and apparatus of producing thin film of metal or metal compound | Kuniaki Horie | 2004-08-24 |
| 6776919 | Method and apparatus for etching ruthenium films | Haruko Ohno, Ichiro Katakabe, Sachiko Kihara | 2004-08-17 |
| 6745784 | Method of and apparatus for cleaning substrate | Ichiro Katakabe, Shinya Morisawa, Haruko Ohno, Sachiko Kihara | 2004-06-08 |
| 6743395 | Composite metallic ultrafine particles and process for producing the same | Hiroshi Nagasawa, Kaori Kagoshima, Makiko Emoto | 2004-06-01 |
| 6740242 | Plating apparatus and method of managing plating liquid composition | Hiroshi Nagasawa | 2004-05-25 |
| 6730596 | Method of and apparatus for forming interconnection | Kuniaki Horie, Naoaki Ogure, Takao Kato, Akihisa Hongo, Hiroshi Nagasawa | 2004-05-04 |
| 6709555 | Plating method, interconnection forming method, and apparatus for carrying out those methods | Naoaki Ogure, Hiroshi Nagasawa | 2004-03-23 |
| 6602396 | Electrolytic machining method and apparatus | Yuzo Mori, Mitsuhiko Shirakashi, Takayuki Saito, Yasushi Toma, Itsuki Kobata | 2003-08-05 |