Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6558478 | Method of and apparatus for cleaning substrate | Ichiro Katakabe, Shinya Morisawa, Haruko Ohno, Sachiko Kihara | 2003-05-06 |
| 6554205 | Gas polishing method, gas polishing nozzle and polishing apparatus | Syuhei Shinozuka, Kaori Miyoshi | 2003-04-29 |
| 6519842 | Method for mounting semiconductor device | Hiroshi Nagasawa | 2003-02-18 |
| 6517642 | Method and apparatus of producing thin film of metal or metal compound | Kuniaki Horie | 2003-02-11 |
| 6447632 | Apparatus and nozzle device for gaseous polishing | Shyuhei Shinozuka, Kaori Miyoshi | 2002-09-10 |
| 6368493 | Electrolytic machining method and apparatus | Yuzo Mori, Mitsuhiko Shirakashi, Takayuki Saito, Yasushi Toma, Itsuki Kobata | 2002-04-09 |
| 6315858 | Gas polishing apparatus and method | Shyuhei Shinozuka, Kaori Miyoshi, Yoichi Kobayashi | 2001-11-13 |
| 6136213 | Gas polishing method | Syuhei Shinozuka, Kaori Miyoshi | 2000-10-24 |
| 5894131 | Exhaust apparatus in ion implantation system | Tetsuo Komai | 1999-04-13 |
| 5788828 | Apparatus for detecting anions in water | Masato Nakatsu, Syu Nakanishi, Takayuki Saito, Kanroku Chounan | 1998-08-04 |
| 5169419 | Gas adsorber for exhaust gas | Yoichi Mori | 1992-12-08 |
| 4906257 | Method of and apparatus for treating waste gas from semiconductor manufacturing process | Manabu Tsujimura | 1990-03-06 |
| 4861578 | Method of treating waste gas | Yoichi Mori | 1989-08-29 |
| 4826805 | Gas absorber | Hidenobu Arimitsu, Yoshiharu Yasuhara, Toshihiko Shiota | 1989-05-02 |