Ichiro Katakabe — 12 Patents at Ebara

Ichiro Katakabe has been granted 12 US patents while listed as an inventor at Ebara. The first was granted in 1997 and the most recent in August 2009. Ichiro Katakabe ranks #396,045 of 4,157,543 US inventors in our database (top 9.5%). Patent records list Ichiro Katakabe in Yokohama, JP.

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Showing 1–12 of 12 patents

Patent #	Title	Co-Inventors	Date
7578886	Substrate processing apparatus, substrate processing method, and substrate holding apparatus	Kaoru Yamada, Takayuki Saito, Sumio Yabe, Kenya Ito, Masayuki Kamezawa +2 more	2009-08-25
7578887	Apparatus for and method of processing substrate	Shinji Kajita, Haruko Ono, Yuki Inoue, Sachiko Takeda	2009-08-25
7309449	Substrate processing method	Haruko Ono, Sachiko Takeda	2007-12-18
6921466	Revolution member supporting apparatus and semiconductor substrate processing apparatus	Akihisa Hongo, Shinya Morisawa	2005-07-26
6776919	Method and apparatus for etching ruthenium films	Akira Fukunaga, Haruko Ohno, Sachiko Kihara	2004-08-17
6745784	Method of and apparatus for cleaning substrate	Shinya Morisawa, Haruko Ohno, Sachiko Kihara, Akira Fukunaga	2004-06-08
6558478	Method of and apparatus for cleaning substrate	Shinya Morisawa, Haruko Ohno, Sachiko Kihara, Akira Fukunaga	2003-05-06
5943578	Method of manufacturing a semiconductor device having an element isolating region	Naoto Miyashita, Hiroshi Kawamoto	1999-08-24
5880032	Method and apparatus for manufacturing a semiconductor device	Kenji Doi, Naoto Miyashita	1999-03-09
5878191	Heat treatment apparatus for semiconductor wafers	Naoto Miyashita, Hiroshi Kawamoto, Kenji Doi, Tsuyoshi Okuda	1999-03-02
5643046	Polishing method and apparatus for detecting a polishing end point of a semiconductor wafer	Naoto Miyashita, Tatsuo Akiyama	1997-07-01
5605488	Polishing apparatus of semiconductor wafer	Hiroyuki Ohashi, Naoto Miyashita, Tetsuya Tsukihara	1997-02-25

Ichiro Katakabe — 12 Patents

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