SY

Sumio Yabe

EB Ebara: 1 patents #1,014 of 1,611Top 65%
Overall (All Time): #3,333,568 of 4,157,543Top 85%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7578886 Substrate processing apparatus, substrate processing method, and substrate holding apparatus Kaoru Yamada, Takayuki Saito, Kenya Ito, Masayuki Kamezawa, Masaya Seki +2 more 2009-08-25