Issued Patents All Time
Showing 25 most recent of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12359339 | Plating apparatus and substrate holder operation method | Masaki Tomita | 2025-07-15 |
| 12347697 | Prewet module and prewet method | — | 2025-07-01 |
| 12270120 | Plating apparatus and plating method | Masaki Tomita, Masashi Shimoyama, Shao Hua Chang | 2025-04-08 |
| 12247311 | Plating apparatus and plating process method | Shao Hua Chang, Yasuyuki Masuda | 2025-03-11 |
| 12180606 | Plating apparatus | Masaki Tomita, Shao Hua Chang | 2024-12-31 |
| 12152311 | Wetting method for substrate and plating apparatus | Shao Hua Chang | 2024-11-26 |
| 12134833 | Plating apparatus and cleaning method of contact member of plating apparatus | Masaki Tomita, Shao Hua Chang | 2024-11-05 |
| 12076760 | Pre-wet module, deaerated liquid circulation system, and pre-wet method | Mitsutoshi Yahagi, Nobuya YAMADA | 2024-09-03 |
| 12054840 | Plating apparatus, pre-wet process method, and cleaning process method | Shao Hua Chang | 2024-08-06 |
| 11906299 | Plating apparatus and film thickness measuring method for substrate | Masaki Tomita, Shao Hua Chang | 2024-02-20 |
| 11846035 | Plating apparatus and plating method | Shao Hua Chang | 2023-12-19 |
| 11833551 | Pre-wet module, deaerated liquid circulation system, and pre-wet method | Mitsutoshi Yahagi, Nobuya YAMADA | 2023-12-05 |
| 11535949 | Substrate holder and plating apparatus | Hideki Takayanagi, Kiyoshi Suzuki, Masayuki Satake, Jumpei Fujikata | 2022-12-27 |
| 11511386 | Polishing apparatus and polishing method | Masayuki Nakanishi, Makoto Kashiwagi | 2022-11-29 |
| 11230789 | Method of removing liquid from seal of a substrate holder | Hideki Takayanagi, Kiyoshi Suzuki, Masayuki Satake, Jumpei Fujikata | 2022-01-25 |
| 10493588 | Polishing apparatus and polishing method | Tetsuji Togawa, Masayuki Nakanishi, Naoki Matsuda, Atsushi Yoshida | 2019-12-03 |
| 10414013 | Polishing method and polishing apparatus | Manao Hoshina | 2019-09-17 |
| 10403505 | Substrate processing method and substrate processing apparatus | Kenya Ito, Kenichi Kobayashi, Michiyoshi YAMASHITA | 2019-09-03 |
| 10343252 | Polishing apparatus for detecting abnormality in polishing of a substrate | Tetsuji Togawa, Hiroyuki Takenaka | 2019-07-09 |
| 10166647 | Polishing apparatus and polishing method | Tamami Takahashi, Hiroaki Kusa, Kenji Yamaguchi, Masayuki Nakanishi | 2019-01-01 |
| 10155294 | Polishing apparatus and polishing method | Tetsuji Togawa, Kenya Ito | 2018-12-18 |
| 10144103 | Polishing apparatus and polishing method | Manao Hoshina | 2018-12-04 |
| 10137552 | Polishing apparatus | Kazuaki Maeda, Tamami Takahashi, Hiroaki Kusa | 2018-11-27 |
| 9914196 | Polishing apparatus and polishing method | Tetsuji Togawa, Kenya Ito | 2018-03-13 |
| 9782869 | Apparatus for detecting abnormality in polishing of a substrate | Tetsuji Togawa, Hiroyuki Takenaka | 2017-10-10 |