Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10427269 | Polishing apparatus and polishing method | Makoto Kashiwagi | 2019-10-01 |
| 10403505 | Substrate processing method and substrate processing apparatus | Kenya Ito, Masaya Seki, Kenichi Kobayashi | 2019-09-03 |
| 9630289 | Polishing method involving a polishing member polishing at angle tangent to the substrate rotational direction | Tetsuji Togawa, Atsushi Yoshida | 2017-04-25 |
| 9492910 | Polishing method | Yu Ishii, Hiroyuki Kawasaki, Masayuki Nakanishi, Kenya Ito, Kenji Kodera | 2016-11-15 |