Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406874 | Substrate holding apparatus, substrate processing apparatus having substrate holding apparatus, and substrate processing method | Manao Hoshina | 2025-09-02 |
| 12377516 | Polishing head and polishing apparatus | — | 2025-08-05 |
| 12237194 | Substrate transporter and substrate processing apparatus including substrate transporter | Akihiro Yazawa, Takashi Koba, Kenichi Kobayashi, Kenichi Akazawa, Fong-Jie Du +5 more | 2025-02-25 |
| 12002704 | Substrate holding apparatus, substrate processing apparatus having substrate holding apparatus, and substrate processing method | Manao Hoshina | 2024-06-04 |
| 11865665 | Polishing apparatus | Kenichi Kobayashi, Masayuki Nakanishi, Manao Hoshina | 2024-01-09 |
| 11858487 | Brake control apparatus and method for detecting abnormality in brake control apparatus | — | 2024-01-02 |
| 11804398 | Workpiece supporting apparatus and workpiece supporting method | Mao Izawa | 2023-10-31 |
| 11701750 | Top ring for holding a substrate and substrate processing apparatus | Yu Ishii, Hirotaka Satori, Manato Furusawa | 2023-07-18 |
| 11697184 | Substrate processing apparatus and substrate processing method | Manao Hoshina | 2023-07-11 |
| 11638980 | Laminated membrane, substrate holder including laminated membrane, and substrate processing apparatus | Kenichi Kobayashi, Asagi Matsugu, Manao Hoshina | 2023-05-02 |
| 11511389 | Polishing head and polishing apparatus | Kenichi Akazawa, Yu Ishii, Atsushi Yoshida, Kenichi Kobayashi, Tetsuji Togawa +1 more | 2022-11-29 |
| 11511386 | Polishing apparatus and polishing method | Masaya Seki, Masayuki Nakanishi | 2022-11-29 |
| 11456406 | Silicon bulk thermoelectric conversion material | Junichiro SHIOMI, Takashi Kodama | 2022-09-27 |
| 11400561 | Top ring for holding a substrate and substrate processing apparatus | Kenichi Kobayashi, Asagi Matsugu, Manao Hoshina | 2022-08-02 |
| 11370080 | Polishing head for holding substrate and substrate processing apparatus | Kenichi Kobayashi | 2022-06-28 |
| 11331768 | Polishing head and polishing apparatus | Fong-Jie Du, Manao Hoshina | 2022-05-17 |
| 11335588 | Substrate holding apparatus and substrate processing apparatus | — | 2022-05-17 |
| 11305399 | Jig for a polishing apparatus | Kenichi Kobayashi, Asagi Matsugu, Manao Hoshina | 2022-04-19 |
| 11180853 | Substrate processing apparatus and substrate processing method | Yu Ishii, Fong-Jie Du | 2021-11-23 |
| 10926376 | Method and apparatus for polishing a substrate, and method for processing a substrate | Masayuki Nakanishi, Yu Ishii, Kenya Ito, Keisuke Uchiyama | 2021-02-23 |
| D890823 | Substrate holding parts | Kenichi Kobayashi, Asagi Matsugu, Manao Hoshina | 2020-07-21 |
| D890824 | Substrate holding parts | Kenichi Kobayashi, Asagi Matsugu, Manao Hoshina | 2020-07-21 |
| D890825 | Substrate holding parts | Kenichi Kobayashi, Asagi Matsugu, Manao Hoshina | 2020-07-21 |
| D890822 | Substrate holding parts | Kenichi Kobayashi, Asagi Matsugu, Manao Hoshina | 2020-07-21 |
| 10458020 | Substrate processing apparatus and substrate processing method | Yu Ishii, Fong-Jie Du | 2019-10-29 |