Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237194 | Substrate transporter and substrate processing apparatus including substrate transporter | Akihiro Yazawa, Takashi Koba, Kenichi Kobayashi, Kenichi Akazawa, Makoto Kashiwagi +5 more | 2025-02-25 |
| 11331768 | Polishing head and polishing apparatus | Makoto Kashiwagi, Manao Hoshina | 2022-05-17 |
| 11180853 | Substrate processing apparatus and substrate processing method | Yu Ishii, Makoto Kashiwagi | 2021-11-23 |
| 10458020 | Substrate processing apparatus and substrate processing method | Yu Ishii, Makoto Kashiwagi | 2019-10-29 |