Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406874 | Substrate holding apparatus, substrate processing apparatus having substrate holding apparatus, and substrate processing method | Makoto Kashiwagi | 2025-09-02 |
| 12002704 | Substrate holding apparatus, substrate processing apparatus having substrate holding apparatus, and substrate processing method | Makoto Kashiwagi | 2024-06-04 |
| 11865665 | Polishing apparatus | Kenichi Kobayashi, Masayuki Nakanishi, Makoto Kashiwagi | 2024-01-09 |
| 11697184 | Substrate processing apparatus and substrate processing method | Makoto Kashiwagi | 2023-07-11 |
| 11638980 | Laminated membrane, substrate holder including laminated membrane, and substrate processing apparatus | Kenichi Kobayashi, Asagi Matsugu, Makoto Kashiwagi | 2023-05-02 |
| 11400561 | Top ring for holding a substrate and substrate processing apparatus | Kenichi Kobayashi, Asagi Matsugu, Makoto Kashiwagi | 2022-08-02 |
| 11331768 | Polishing head and polishing apparatus | Makoto Kashiwagi, Fong-Jie Du | 2022-05-17 |
| 11305399 | Jig for a polishing apparatus | Kenichi Kobayashi, Asagi Matsugu, Makoto Kashiwagi | 2022-04-19 |
| D890824 | Substrate holding parts | Kenichi Kobayashi, Asagi Matsugu, Makoto Kashiwagi | 2020-07-21 |
| D890822 | Substrate holding parts | Kenichi Kobayashi, Asagi Matsugu, Makoto Kashiwagi | 2020-07-21 |
| D890823 | Substrate holding parts | Kenichi Kobayashi, Asagi Matsugu, Makoto Kashiwagi | 2020-07-21 |
| D890825 | Substrate holding parts | Kenichi Kobayashi, Asagi Matsugu, Makoto Kashiwagi | 2020-07-21 |
| 10525564 | Reversing machine and substrate polishing apparatus | Kenichi Akazawa, Kenichi Kobayashi, Akihiro Yazawa | 2020-01-07 |
| 10414013 | Polishing method and polishing apparatus | Masaya Seki | 2019-09-17 |
| 10144103 | Polishing apparatus and polishing method | Masaya Seki | 2018-12-04 |
| 9892953 | Substrate gripping apparatus | Mitsuru Miyazaki, Naoki Matsuda, Junji Kunisawa | 2018-02-13 |
| 9269605 | Substrate gripping apparatus | Mitsuru Miyazaki, Naoki Matsuda, Junji Kunisawa | 2016-02-23 |